JPS6352427B2 - - Google Patents

Info

Publication number
JPS6352427B2
JPS6352427B2 JP57089097A JP8909782A JPS6352427B2 JP S6352427 B2 JPS6352427 B2 JP S6352427B2 JP 57089097 A JP57089097 A JP 57089097A JP 8909782 A JP8909782 A JP 8909782A JP S6352427 B2 JPS6352427 B2 JP S6352427B2
Authority
JP
Japan
Prior art keywords
image
electron beam
diffraction
sample
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57089097A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58206036A (ja
Inventor
Eiichi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57089097A priority Critical patent/JPS58206036A/ja
Publication of JPS58206036A publication Critical patent/JPS58206036A/ja
Publication of JPS6352427B2 publication Critical patent/JPS6352427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57089097A 1982-05-26 1982-05-26 電子顕微鏡 Granted JPS58206036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57089097A JPS58206036A (ja) 1982-05-26 1982-05-26 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57089097A JPS58206036A (ja) 1982-05-26 1982-05-26 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS58206036A JPS58206036A (ja) 1983-12-01
JPS6352427B2 true JPS6352427B2 (OSRAM) 1988-10-19

Family

ID=13961374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57089097A Granted JPS58206036A (ja) 1982-05-26 1982-05-26 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS58206036A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4704776B2 (ja) * 2005-03-07 2011-06-22 富士通株式会社 結晶材料の格子歪みの評価方法及びその評価装置

Also Published As

Publication number Publication date
JPS58206036A (ja) 1983-12-01

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