JPS6352111B2 - - Google Patents
Info
- Publication number
- JPS6352111B2 JPS6352111B2 JP56073052A JP7305281A JPS6352111B2 JP S6352111 B2 JPS6352111 B2 JP S6352111B2 JP 56073052 A JP56073052 A JP 56073052A JP 7305281 A JP7305281 A JP 7305281A JP S6352111 B2 JPS6352111 B2 JP S6352111B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cylindrical mesh
- evaporation method
- thin film
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 239000010408 film Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 11
- 238000003756 stirring Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000000427 thin-film deposition Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7305281A JPS57188677A (en) | 1981-05-14 | 1981-05-14 | Vapor depositing device for metallic thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7305281A JPS57188677A (en) | 1981-05-14 | 1981-05-14 | Vapor depositing device for metallic thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57188677A JPS57188677A (en) | 1982-11-19 |
JPS6352111B2 true JPS6352111B2 (zh) | 1988-10-18 |
Family
ID=13507202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7305281A Granted JPS57188677A (en) | 1981-05-14 | 1981-05-14 | Vapor depositing device for metallic thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188677A (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0245051A (ja) * | 1988-08-04 | 1990-02-15 | Shiro Yamada | 植毛用人造毛の製造方法およびその製造装置 |
EP1136587B1 (en) * | 2000-03-23 | 2013-05-15 | Hitachi Metals, Ltd. | Deposited-film forming apparatus |
JP2006342384A (ja) * | 2005-06-08 | 2006-12-21 | Moritex Corp | 全面フィルタ膜付き球レンズの製造方法,製造装置及び全面フィルタ膜付き球レンズ並びに光モジュール |
JP4899717B2 (ja) * | 2006-08-21 | 2012-03-21 | ソニー株式会社 | 複合粉体の製造方法、及び複合粉体の製造装置 |
JP5749223B2 (ja) * | 2012-07-13 | 2015-07-15 | 株式会社メイハン | 球状体の被膜形成方法 |
EP3567128A1 (en) * | 2018-05-08 | 2019-11-13 | IHI Hauzer Techno Coating B.V. | Deposition apparatus and method of coating spherical objects |
CN115287601B (zh) * | 2022-08-05 | 2023-09-22 | 温州鑫淼电镀有限公司 | 一种塑胶制品的真空镀膜工艺 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5059441A (zh) * | 1973-09-27 | 1975-05-22 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5441155Y2 (zh) * | 1975-05-01 | 1979-12-03 | ||
JPS5441156Y2 (zh) * | 1975-05-01 | 1979-12-03 |
-
1981
- 1981-05-14 JP JP7305281A patent/JPS57188677A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5059441A (zh) * | 1973-09-27 | 1975-05-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS57188677A (en) | 1982-11-19 |
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