JPH0527489Y2 - - Google Patents
Info
- Publication number
- JPH0527489Y2 JPH0527489Y2 JP14787687U JP14787687U JPH0527489Y2 JP H0527489 Y2 JPH0527489 Y2 JP H0527489Y2 JP 14787687 U JP14787687 U JP 14787687U JP 14787687 U JP14787687 U JP 14787687U JP H0527489 Y2 JPH0527489 Y2 JP H0527489Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- substrate
- evaporation source
- beam evaporation
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 33
- 238000005566 electron beam evaporation Methods 0.000 claims description 24
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 239000010408 film Substances 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14787687U JPH0527489Y2 (zh) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14787687U JPH0527489Y2 (zh) | 1987-09-28 | 1987-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453750U JPS6453750U (zh) | 1989-04-03 |
| JPH0527489Y2 true JPH0527489Y2 (zh) | 1993-07-13 |
Family
ID=31418687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14787687U Expired - Lifetime JPH0527489Y2 (zh) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527489Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014005478A (ja) * | 2010-10-08 | 2014-01-16 | Kaneka Corp | 蒸着装置 |
-
1987
- 1987-09-28 JP JP14787687U patent/JPH0527489Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6453750U (zh) | 1989-04-03 |
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