JPS6350853B2 - - Google Patents

Info

Publication number
JPS6350853B2
JPS6350853B2 JP58061737A JP6173783A JPS6350853B2 JP S6350853 B2 JPS6350853 B2 JP S6350853B2 JP 58061737 A JP58061737 A JP 58061737A JP 6173783 A JP6173783 A JP 6173783A JP S6350853 B2 JPS6350853 B2 JP S6350853B2
Authority
JP
Japan
Prior art keywords
exposure
wafer
ray
mask
exposure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58061737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59188123A (ja
Inventor
Koichi Okada
Hisao Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd, Nippon Kogaku KK filed Critical Nippon Electric Co Ltd
Priority to JP58061737A priority Critical patent/JPS59188123A/ja
Publication of JPS59188123A publication Critical patent/JPS59188123A/ja
Publication of JPS6350853B2 publication Critical patent/JPS6350853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP58061737A 1983-04-08 1983-04-08 Ｘ線露光装置 Granted JPS59188123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58061737A JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58061737A JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Publications (2)

Publication Number Publication Date
JPS59188123A JPS59188123A (ja) 1984-10-25
JPS6350853B2 true JPS6350853B2 (enExample) 1988-10-12

Family

ID=13179802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58061737A Granted JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Country Status (1)

Country Link
JP (1) JPS59188123A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2578579B2 (ja) * 1994-07-11 1997-02-05 キヤノン株式会社 露光装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424267A (en) * 1977-07-27 1979-02-23 Hitachi Cable Ltd Connecting method for composite wire for use of adding liquid metal
JPS5456771A (en) * 1977-10-14 1979-05-08 Cho Lsi Gijutsu Kenkyu Kumiai Soft xxray exposing device
JPS551107A (en) * 1978-06-16 1980-01-07 Nippon Telegr & Teleph Corp <Ntt> Exposure device
JPS5760645A (en) * 1980-09-26 1982-04-12 Fujitsu Ltd X-ray projector

Also Published As

Publication number Publication date
JPS59188123A (ja) 1984-10-25

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