JPS59188123A - Ｘ線露光装置 - Google Patents

Ｘ線露光装置

Info

Publication number
JPS59188123A
JPS59188123A JP58061737A JP6173783A JPS59188123A JP S59188123 A JPS59188123 A JP S59188123A JP 58061737 A JP58061737 A JP 58061737A JP 6173783 A JP6173783 A JP 6173783A JP S59188123 A JPS59188123 A JP S59188123A
Authority
JP
Japan
Prior art keywords
exposure
wafer
ray
chamber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58061737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350853B2 (enExample
Inventor
Koichi Okada
浩一 岡田
Hisao Izawa
伊沢　久男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
NEC Corp
Original Assignee
Nikon Corp
NEC Corp
Nippon Electric Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, NEC Corp, Nippon Electric Co Ltd, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP58061737A priority Critical patent/JPS59188123A/ja
Publication of JPS59188123A publication Critical patent/JPS59188123A/ja
Publication of JPS6350853B2 publication Critical patent/JPS6350853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP58061737A 1983-04-08 1983-04-08 Ｘ線露光装置 Granted JPS59188123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58061737A JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58061737A JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Publications (2)

Publication Number Publication Date
JPS59188123A true JPS59188123A (ja) 1984-10-25
JPS6350853B2 JPS6350853B2 (enExample) 1988-10-12

Family

ID=13179802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58061737A Granted JPS59188123A (ja) 1983-04-08 1983-04-08 Ｘ線露光装置

Country Status (1)

Country Link
JP (1) JPS59188123A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758010A (ja) * 1994-07-11 1995-03-03 Canon Inc 露光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424267A (en) * 1977-07-27 1979-02-23 Hitachi Cable Ltd Connecting method for composite wire for use of adding liquid metal
JPS5456771A (en) * 1977-10-14 1979-05-08 Cho Lsi Gijutsu Kenkyu Kumiai Soft xxray exposing device
JPS551107A (en) * 1978-06-16 1980-01-07 Nippon Telegr & Teleph Corp <Ntt> Exposure device
JPS5760645A (en) * 1980-09-26 1982-04-12 Fujitsu Ltd X-ray projector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424267A (en) * 1977-07-27 1979-02-23 Hitachi Cable Ltd Connecting method for composite wire for use of adding liquid metal
JPS5456771A (en) * 1977-10-14 1979-05-08 Cho Lsi Gijutsu Kenkyu Kumiai Soft xxray exposing device
JPS551107A (en) * 1978-06-16 1980-01-07 Nippon Telegr & Teleph Corp <Ntt> Exposure device
JPS5760645A (en) * 1980-09-26 1982-04-12 Fujitsu Ltd X-ray projector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758010A (ja) * 1994-07-11 1995-03-03 Canon Inc 露光装置

Also Published As

Publication number Publication date
JPS6350853B2 (enExample) 1988-10-12

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