JPS6348186B2 - - Google Patents

Info

Publication number
JPS6348186B2
JPS6348186B2 JP58169788A JP16978883A JPS6348186B2 JP S6348186 B2 JPS6348186 B2 JP S6348186B2 JP 58169788 A JP58169788 A JP 58169788A JP 16978883 A JP16978883 A JP 16978883A JP S6348186 B2 JPS6348186 B2 JP S6348186B2
Authority
JP
Japan
Prior art keywords
upper electrode
unit capacitance
capacitance element
semiconductor integrated
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58169788A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6060751A (ja
Inventor
Susumu Urya
Juji Gondai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58169788A priority Critical patent/JPS6060751A/ja
Publication of JPS6060751A publication Critical patent/JPS6060751A/ja
Publication of JPS6348186B2 publication Critical patent/JPS6348186B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/206—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of combinations of capacitors and resistors

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP58169788A 1983-09-14 1983-09-14 半導体集積回路 Granted JPS6060751A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58169788A JPS6060751A (ja) 1983-09-14 1983-09-14 半導体集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58169788A JPS6060751A (ja) 1983-09-14 1983-09-14 半導体集積回路

Publications (2)

Publication Number Publication Date
JPS6060751A JPS6060751A (ja) 1985-04-08
JPS6348186B2 true JPS6348186B2 (enrdf_load_stackoverflow) 1988-09-28

Family

ID=15892883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58169788A Granted JPS6060751A (ja) 1983-09-14 1983-09-14 半導体集積回路

Country Status (1)

Country Link
JP (1) JPS6060751A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461043A (en) * 1987-09-01 1989-03-08 Nec Corp Semiconductor device
JPH0864764A (ja) * 1994-08-25 1996-03-08 Nippon Motorola Ltd ユニットキャパシタ
JP2004179419A (ja) 2002-11-27 2004-06-24 Toshiba Corp 半導体装置及びその製造方法
CN103765574B (zh) * 2011-08-24 2017-06-30 瑞萨电子株式会社 半导体装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE JOURNAL OF SOLID-STATE CIRCUITS=1975 *

Also Published As

Publication number Publication date
JPS6060751A (ja) 1985-04-08

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