JPS6347902A - 感湿体の製造方法 - Google Patents

感湿体の製造方法

Info

Publication number
JPS6347902A
JPS6347902A JP61192239A JP19223986A JPS6347902A JP S6347902 A JPS6347902 A JP S6347902A JP 61192239 A JP61192239 A JP 61192239A JP 19223986 A JP19223986 A JP 19223986A JP S6347902 A JPS6347902 A JP S6347902A
Authority
JP
Japan
Prior art keywords
moisture
humidity
zirconium phosphate
moisture sensitive
sensitive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61192239A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447441B2 (enrdf_load_stackoverflow
Inventor
石沢 健喜
黒島 浩
享 中山
芳彦 定岡
酒井 義郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinagawa Refractories Co Ltd
Original Assignee
Shinagawa Refractories Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinagawa Refractories Co Ltd filed Critical Shinagawa Refractories Co Ltd
Priority to JP61192239A priority Critical patent/JPS6347902A/ja
Publication of JPS6347902A publication Critical patent/JPS6347902A/ja
Publication of JPH0447441B2 publication Critical patent/JPH0447441B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP61192239A 1986-08-18 1986-08-18 感湿体の製造方法 Granted JPS6347902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61192239A JPS6347902A (ja) 1986-08-18 1986-08-18 感湿体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61192239A JPS6347902A (ja) 1986-08-18 1986-08-18 感湿体の製造方法

Publications (2)

Publication Number Publication Date
JPS6347902A true JPS6347902A (ja) 1988-02-29
JPH0447441B2 JPH0447441B2 (enrdf_load_stackoverflow) 1992-08-04

Family

ID=16287969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61192239A Granted JPS6347902A (ja) 1986-08-18 1986-08-18 感湿体の製造方法

Country Status (1)

Country Link
JP (1) JPS6347902A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568747A (en) * 1992-01-13 1996-10-29 Lloyd; Robert H. Moisture sensor
CN105784786A (zh) * 2015-01-09 2016-07-20 罗伯特·博世有限公司 用于检测气态分析物的方法和传感器设备及其制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143187A (en) * 1978-04-28 1979-11-08 Hitachi Ltd Moisture sensing element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143187A (en) * 1978-04-28 1979-11-08 Hitachi Ltd Moisture sensing element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568747A (en) * 1992-01-13 1996-10-29 Lloyd; Robert H. Moisture sensor
CN105784786A (zh) * 2015-01-09 2016-07-20 罗伯特·博世有限公司 用于检测气态分析物的方法和传感器设备及其制造方法

Also Published As

Publication number Publication date
JPH0447441B2 (enrdf_load_stackoverflow) 1992-08-04

Similar Documents

Publication Publication Date Title
JPS59202052A (ja) 感湿素子
JP2789522B2 (ja) 基板上に黄緑石型酸化タングステン層を形成する方法および該黄緑石型酸化タングステン層含有湿度センサ素子
US5855849A (en) Solid state humidity sensor
JP4448243B2 (ja) リン酸イオン選択性電極およびその作製方法
JPS6156952A (ja) 感湿抵抗素子
JPS6347902A (ja) 感湿体の製造方法
JPS60188835A (ja) 感湿素子
US4424508A (en) Moisture sensitive element
Li et al. Lacunar pyrochlore-type tungsten oxides as humidity-sensing materials
CN201096743Y (zh) 聚电解质/本征导电聚合物复合电阻型薄膜湿敏元件
JPS6344701A (ja) 感湿体
JPS6217361B2 (enrdf_load_stackoverflow)
JPH05119010A (ja) 湿度センサ
JPH05119009A (ja) 湿度センサ
TW305046B (en) Method of forming a pyrochlore-type tungsten oxide layer on a substrate
JPS6133372B2 (enrdf_load_stackoverflow)
JPH05196591A (ja) 湿度センサ
JPH05322826A (ja) 湿度センサ
JPS60247901A (ja) 感湿材料
JPH04152260A (ja) 湿度センサ
JPH05249065A (ja) 湿度センサ
JPH04147049A (ja) 湿度センサ
JPH04279852A (ja) 湿度センサ
JPH05322825A (ja) 湿度センサ
JPH04143648A (ja) 湿度センサ