JPS63477A - 酸化タンタル薄膜の製法 - Google Patents

酸化タンタル薄膜の製法

Info

Publication number
JPS63477A
JPS63477A JP14383086A JP14383086A JPS63477A JP S63477 A JPS63477 A JP S63477A JP 14383086 A JP14383086 A JP 14383086A JP 14383086 A JP14383086 A JP 14383086A JP S63477 A JPS63477 A JP S63477A
Authority
JP
Japan
Prior art keywords
tantalum oxide
film
thin film
substrate
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14383086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424431B2 (enrdf_load_stackoverflow
Inventor
Koji Yamagishi
山岸　耕二
Yasuo Tarui
垂井　康夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP14383086A priority Critical patent/JPS63477A/ja
Publication of JPS63477A publication Critical patent/JPS63477A/ja
Publication of JPH0424431B2 publication Critical patent/JPH0424431B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP14383086A 1986-06-18 1986-06-18 酸化タンタル薄膜の製法 Granted JPS63477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14383086A JPS63477A (ja) 1986-06-18 1986-06-18 酸化タンタル薄膜の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14383086A JPS63477A (ja) 1986-06-18 1986-06-18 酸化タンタル薄膜の製法

Publications (2)

Publication Number Publication Date
JPS63477A true JPS63477A (ja) 1988-01-05
JPH0424431B2 JPH0424431B2 (enrdf_load_stackoverflow) 1992-04-27

Family

ID=15347937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14383086A Granted JPS63477A (ja) 1986-06-18 1986-06-18 酸化タンタル薄膜の製法

Country Status (1)

Country Link
JP (1) JPS63477A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196427A (ja) * 1989-01-25 1990-08-03 Nec Corp 金属酸化膜の気相成長方法
CN100342287C (zh) * 2002-09-24 2007-10-10 株式会社理光 采用色粉容器和处理盒的成像装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196427A (ja) * 1989-01-25 1990-08-03 Nec Corp 金属酸化膜の気相成長方法
CN100342287C (zh) * 2002-09-24 2007-10-10 株式会社理光 采用色粉容器和处理盒的成像装置

Also Published As

Publication number Publication date
JPH0424431B2 (enrdf_load_stackoverflow) 1992-04-27

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