JPS63477A - 酸化タンタル薄膜の製法 - Google Patents
酸化タンタル薄膜の製法Info
- Publication number
- JPS63477A JPS63477A JP14383086A JP14383086A JPS63477A JP S63477 A JPS63477 A JP S63477A JP 14383086 A JP14383086 A JP 14383086A JP 14383086 A JP14383086 A JP 14383086A JP S63477 A JPS63477 A JP S63477A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- tantalum oxide
- reactor
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 title claims description 17
- 229910001936 tantalum oxide Inorganic materials 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims abstract description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 11
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims description 20
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 6
- 239000003989 dielectric material Substances 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 229910004537 TaCl5 Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 150000004703 alkoxides Chemical class 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000006552 photochemical reaction Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 101100480488 Rattus norvegicus Taar8c gene Proteins 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14383086A JPS63477A (ja) | 1986-06-18 | 1986-06-18 | 酸化タンタル薄膜の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14383086A JPS63477A (ja) | 1986-06-18 | 1986-06-18 | 酸化タンタル薄膜の製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63477A true JPS63477A (ja) | 1988-01-05 |
| JPH0424431B2 JPH0424431B2 (enrdf_load_stackoverflow) | 1992-04-27 |
Family
ID=15347937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14383086A Granted JPS63477A (ja) | 1986-06-18 | 1986-06-18 | 酸化タンタル薄膜の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63477A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196427A (ja) * | 1989-01-25 | 1990-08-03 | Nec Corp | 金属酸化膜の気相成長方法 |
| CN100342287C (zh) * | 2002-09-24 | 2007-10-10 | 株式会社理光 | 采用色粉容器和处理盒的成像装置 |
-
1986
- 1986-06-18 JP JP14383086A patent/JPS63477A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196427A (ja) * | 1989-01-25 | 1990-08-03 | Nec Corp | 金属酸化膜の気相成長方法 |
| CN100342287C (zh) * | 2002-09-24 | 2007-10-10 | 株式会社理光 | 采用色粉容器和处理盒的成像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0424431B2 (enrdf_load_stackoverflow) | 1992-04-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |