JPS6343880B2 - - Google Patents

Info

Publication number
JPS6343880B2
JPS6343880B2 JP59095595A JP9559584A JPS6343880B2 JP S6343880 B2 JPS6343880 B2 JP S6343880B2 JP 59095595 A JP59095595 A JP 59095595A JP 9559584 A JP9559584 A JP 9559584A JP S6343880 B2 JPS6343880 B2 JP S6343880B2
Authority
JP
Japan
Prior art keywords
gas
film
insulating layer
sio
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59095595A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60240097A (ja
Inventor
Mutsuhiro Sekido
Naoji Hayashi
Mitsuro Mita
Masataka Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP59095595A priority Critical patent/JPS60240097A/ja
Publication of JPS60240097A publication Critical patent/JPS60240097A/ja
Publication of JPS6343880B2 publication Critical patent/JPS6343880B2/ja
Granted legal-status Critical Current

Links

JP59095595A 1984-05-15 1984-05-15 Ｅｌパネルとその製造方法 Granted JPS60240097A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59095595A JPS60240097A (ja) 1984-05-15 1984-05-15 Ｅｌパネルとその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59095595A JPS60240097A (ja) 1984-05-15 1984-05-15 Ｅｌパネルとその製造方法

Publications (2)

Publication Number Publication Date
JPS60240097A JPS60240097A (ja) 1985-11-28
JPS6343880B2 true JPS6343880B2 (enrdf_load_stackoverflow) 1988-09-01

Family

ID=14141917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59095595A Granted JPS60240097A (ja) 1984-05-15 1984-05-15 Ｅｌパネルとその製造方法

Country Status (1)

Country Link
JP (1) JPS60240097A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63994A (ja) * 1986-06-18 1988-01-05 松下電器産業株式会社 薄膜電場発光素子の製造法
JPH0740515B2 (ja) * 1986-08-13 1995-05-01 株式会社日立製作所 薄膜発光素子
JPS63250090A (ja) * 1987-04-07 1988-10-17 シャープ株式会社 薄膜ｅｌパネル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57124883A (en) * 1981-01-26 1982-08-03 Sharp Kk Thin film el element

Also Published As

Publication number Publication date
JPS60240097A (ja) 1985-11-28

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