JPS6341215B2 - - Google Patents
Info
- Publication number
- JPS6341215B2 JPS6341215B2 JP54049027A JP4902779A JPS6341215B2 JP S6341215 B2 JPS6341215 B2 JP S6341215B2 JP 54049027 A JP54049027 A JP 54049027A JP 4902779 A JP4902779 A JP 4902779A JP S6341215 B2 JPS6341215 B2 JP S6341215B2
- Authority
- JP
- Japan
- Prior art keywords
- wedge
- bonding
- wire
- speed
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims abstract description 26
- 239000008188 pellet Substances 0.000 claims description 14
- 230000007704 transition Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 abstract description 9
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2224/7825—Means for applying energy, e.g. heating means
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- H01L2224/78313—Wedge
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- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85203—Thermocompression bonding
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- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
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- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2924/01005—Boron [B]
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- H01L2924/097—Glass-ceramics, e.g. devitrified glass
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
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- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H01L2924/151—Die mounting substrate
- H01L2924/15165—Monolayer substrate
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4902779A JPS55141736A (en) | 1979-04-23 | 1979-04-23 | Method for wirebonding and wirebonder |
GB8013084A GB2047596A (en) | 1979-04-23 | 1980-04-21 | Method of wire-bonding and wire-bonder |
DE19803015683 DE3015683A1 (de) | 1979-04-23 | 1980-04-23 | Mikroschweissverfahren und -vorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4902779A JPS55141736A (en) | 1979-04-23 | 1979-04-23 | Method for wirebonding and wirebonder |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60212495A Division JPS6193638A (ja) | 1985-09-27 | 1985-09-27 | ワイヤホンダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55141736A JPS55141736A (en) | 1980-11-05 |
JPS6341215B2 true JPS6341215B2 (enrdf_load_stackoverflow) | 1988-08-16 |
Family
ID=12819608
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4902779A Granted JPS55141736A (en) | 1979-04-23 | 1979-04-23 | Method for wirebonding and wirebonder |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS55141736A (enrdf_load_stackoverflow) |
DE (1) | DE3015683A1 (enrdf_load_stackoverflow) |
GB (1) | GB2047596A (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2125720B (en) * | 1982-08-24 | 1986-11-05 | Asm Assembly Automation Ltd | Wire bonding apparatus |
US4603803A (en) * | 1982-08-24 | 1986-08-05 | Asm Assembly Automation, Ltd. | Wire bonding apparatus |
KR880701152A (ko) * | 1986-05-16 | 1988-07-25 | 파라사트 파하드 | 수동와이어 본딩장치 |
JP2755667B2 (ja) * | 1989-03-27 | 1998-05-20 | 株式会社東芝 | モータ駆動回路及びワイヤボンディング装置 |
JP2549191B2 (ja) * | 1990-09-10 | 1996-10-30 | 株式会社日立製作所 | ワイヤボンディング方法、およびその装置 |
US5443200A (en) * | 1993-10-13 | 1995-08-22 | Matsushita Electric Industrial Co., Ltd. | Bonding apparatus and bonding method |
DE102020007235A1 (de) * | 2020-11-26 | 2022-06-02 | Mühlbauer Gmbh & Co. Kg | Thermokompressionsvorrichtung und Verfahren zum Verbinden von elektrischen Bauteilen mit einem Substrat |
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1979
- 1979-04-23 JP JP4902779A patent/JPS55141736A/ja active Granted
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1980
- 1980-04-21 GB GB8013084A patent/GB2047596A/en not_active Withdrawn
- 1980-04-23 DE DE19803015683 patent/DE3015683A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2047596A (en) | 1980-12-03 |
DE3015683A1 (de) | 1980-11-13 |
JPS55141736A (en) | 1980-11-05 |
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