JPS6335600B2 - - Google Patents
Info
- Publication number
- JPS6335600B2 JPS6335600B2 JP58157625A JP15762583A JPS6335600B2 JP S6335600 B2 JPS6335600 B2 JP S6335600B2 JP 58157625 A JP58157625 A JP 58157625A JP 15762583 A JP15762583 A JP 15762583A JP S6335600 B2 JPS6335600 B2 JP S6335600B2
- Authority
- JP
- Japan
- Prior art keywords
- volatile component
- compound semiconductor
- melt
- vapor
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15762583A JPS6051697A (ja) | 1983-08-29 | 1983-08-29 | 化合物半導体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15762583A JPS6051697A (ja) | 1983-08-29 | 1983-08-29 | 化合物半導体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6051697A JPS6051697A (ja) | 1985-03-23 |
JPS6335600B2 true JPS6335600B2 (enrdf_load_stackoverflow) | 1988-07-15 |
Family
ID=15653816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15762583A Granted JPS6051697A (ja) | 1983-08-29 | 1983-08-29 | 化合物半導体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6051697A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61227985A (ja) * | 1985-04-02 | 1986-10-11 | Hitachi Cable Ltd | 化合物半導体単結晶の製造方法 |
JPS6230689A (ja) * | 1985-08-02 | 1987-02-09 | Mitsubishi Metal Corp | 3−5族化合物半導体結晶の成長方法および装置 |
CN102628180A (zh) * | 2012-04-23 | 2012-08-08 | 南京金美镓业有限公司 | 一种高纯度磷化铟多晶棒的制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5212152A (en) * | 1975-07-18 | 1977-01-29 | Idemitsu Kosan Co Ltd | Process for alkylation of adamantanes |
JPS606920B2 (ja) * | 1982-11-12 | 1985-02-21 | 工業技術院長 | ガリウム砒素単結晶製造装置 |
-
1983
- 1983-08-29 JP JP15762583A patent/JPS6051697A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6051697A (ja) | 1985-03-23 |
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