JPS6335102B2 - - Google Patents

Info

Publication number
JPS6335102B2
JPS6335102B2 JP58198375A JP19837583A JPS6335102B2 JP S6335102 B2 JPS6335102 B2 JP S6335102B2 JP 58198375 A JP58198375 A JP 58198375A JP 19837583 A JP19837583 A JP 19837583A JP S6335102 B2 JPS6335102 B2 JP S6335102B2
Authority
JP
Japan
Prior art keywords
chamber
substrate
lift
tray
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58198375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6091652A (ja
Inventor
Kyoshi Mochida
Isao Saito
Hisaharu Obinata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP58198375A priority Critical patent/JPS6091652A/ja
Publication of JPS6091652A publication Critical patent/JPS6091652A/ja
Publication of JPS6335102B2 publication Critical patent/JPS6335102B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment

Landscapes

  • Special Conveying (AREA)
  • Transmission Devices (AREA)
JP58198375A 1983-10-25 1983-10-25 基板搬送装置 Granted JPS6091652A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58198375A JPS6091652A (ja) 1983-10-25 1983-10-25 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58198375A JPS6091652A (ja) 1983-10-25 1983-10-25 基板搬送装置

Publications (2)

Publication Number Publication Date
JPS6091652A JPS6091652A (ja) 1985-05-23
JPS6335102B2 true JPS6335102B2 (enExample) 1988-07-13

Family

ID=16390063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58198375A Granted JPS6091652A (ja) 1983-10-25 1983-10-25 基板搬送装置

Country Status (1)

Country Link
JP (1) JPS6091652A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033006A (ja) * 1989-05-31 1991-01-09 Rika Kogyo Kk 調節計
WO1994015117A1 (fr) * 1992-12-28 1994-07-07 Yoshiki Industrial Co., Ltd. Levier presentant un point de support fixe, un point de force oscillant et un point d'application oscillant, et machine-outil utilisant ce levier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033006A (ja) * 1989-05-31 1991-01-09 Rika Kogyo Kk 調節計
WO1994015117A1 (fr) * 1992-12-28 1994-07-07 Yoshiki Industrial Co., Ltd. Levier presentant un point de support fixe, un point de force oscillant et un point d'application oscillant, et machine-outil utilisant ce levier

Also Published As

Publication number Publication date
JPS6091652A (ja) 1985-05-23

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