JPS6332393Y2 - - Google Patents
Info
- Publication number
- JPS6332393Y2 JPS6332393Y2 JP12661383U JP12661383U JPS6332393Y2 JP S6332393 Y2 JPS6332393 Y2 JP S6332393Y2 JP 12661383 U JP12661383 U JP 12661383U JP 12661383 U JP12661383 U JP 12661383U JP S6332393 Y2 JPS6332393 Y2 JP S6332393Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- base
- opening
- pump
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005086 pumping Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12661383U JPS6034594U (ja) | 1983-08-16 | 1983-08-16 | 縦型タ−ボ分子ポンプ |
GB08419569A GB2146073B (en) | 1983-08-16 | 1984-08-01 | Turbomolecular pumps |
DE19843429137 DE3429137A1 (de) | 1983-08-16 | 1984-08-08 | Turbomolekularpumpe |
FR8412535A FR2550829B1 (fr) | 1983-08-16 | 1984-08-08 | Pompe turbo-moleculaire verticale |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12661383U JPS6034594U (ja) | 1983-08-16 | 1983-08-16 | 縦型タ−ボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6034594U JPS6034594U (ja) | 1985-03-09 |
JPS6332393Y2 true JPS6332393Y2 (de) | 1988-08-29 |
Family
ID=14939531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12661383U Granted JPS6034594U (ja) | 1983-08-16 | 1983-08-16 | 縦型タ−ボ分子ポンプ |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS6034594U (de) |
DE (1) | DE3429137A1 (de) |
FR (1) | FR2550829B1 (de) |
GB (1) | GB2146073B (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
JPH01277698A (ja) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | 複合型真空ポンプ |
DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
DE4237971B4 (de) † | 1992-11-11 | 2004-05-06 | Unaxis Deutschland Holding Gmbh | Vakuumpumpe mit Wandler |
CN102865250B (zh) * | 2012-09-27 | 2017-04-19 | 上海华虹宏力半导体制造有限公司 | 用于半导体制造的泵抽吸端口的遮挡盖 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR887499A (fr) * | 1941-11-04 | 1943-11-15 | Brown | Pompe moléculaire |
BE619944A (fr) * | 1961-08-04 | 1963-01-09 | Snecma | Pompe à vide turbomoleculaire perfectionnée |
FR2224009A5 (de) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
DE2354046A1 (de) * | 1973-10-29 | 1975-05-07 | Battelle Institut E V | Elektrisch angetriebene turbomolekularvakuumpumpe |
DE2409857B2 (de) * | 1974-03-01 | 1977-03-24 | Leybold-Heraeus GmbH & Co KG, 5000Köln | Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor |
DE2554995A1 (de) * | 1975-12-06 | 1977-06-16 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
-
1983
- 1983-08-16 JP JP12661383U patent/JPS6034594U/ja active Granted
-
1984
- 1984-08-01 GB GB08419569A patent/GB2146073B/en not_active Expired
- 1984-08-08 DE DE19843429137 patent/DE3429137A1/de active Granted
- 1984-08-08 FR FR8412535A patent/FR2550829B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE3429137C2 (de) | 1993-08-05 |
JPS6034594U (ja) | 1985-03-09 |
GB8419569D0 (en) | 1984-09-05 |
FR2550829A1 (fr) | 1985-02-22 |
GB2146073B (en) | 1987-04-01 |
DE3429137A1 (de) | 1985-03-07 |
GB2146073A (en) | 1985-04-11 |
FR2550829B1 (fr) | 1988-01-08 |
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