JPS6332221B2 - - Google Patents
Info
- Publication number
- JPS6332221B2 JPS6332221B2 JP56141157A JP14115781A JPS6332221B2 JP S6332221 B2 JPS6332221 B2 JP S6332221B2 JP 56141157 A JP56141157 A JP 56141157A JP 14115781 A JP14115781 A JP 14115781A JP S6332221 B2 JPS6332221 B2 JP S6332221B2
- Authority
- JP
- Japan
- Prior art keywords
- vertical
- horizontal
- signal
- scanning
- charged particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000000137 annealing Methods 0.000 claims description 22
- 238000001816 cooling Methods 0.000 claims description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 18
- 201000009310 astigmatism Diseases 0.000 description 10
- 238000000034 method Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14115781A JPS5842152A (ja) | 1981-09-08 | 1981-09-08 | 走査荷電粒子線による試料のアニール加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14115781A JPS5842152A (ja) | 1981-09-08 | 1981-09-08 | 走査荷電粒子線による試料のアニール加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5842152A JPS5842152A (ja) | 1983-03-11 |
| JPS6332221B2 true JPS6332221B2 (ru) | 1988-06-29 |
Family
ID=15285450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14115781A Granted JPS5842152A (ja) | 1981-09-08 | 1981-09-08 | 走査荷電粒子線による試料のアニール加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842152A (ru) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158861A (en) * | 1978-05-12 | 1979-12-15 | Philips Nv | Method of and device for injecting ion |
| JPS5679438A (en) * | 1979-12-04 | 1981-06-30 | Toshiba Corp | Working device for charged particle beam |
-
1981
- 1981-09-08 JP JP14115781A patent/JPS5842152A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158861A (en) * | 1978-05-12 | 1979-12-15 | Philips Nv | Method of and device for injecting ion |
| JPS5679438A (en) * | 1979-12-04 | 1981-06-30 | Toshiba Corp | Working device for charged particle beam |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5842152A (ja) | 1983-03-11 |
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