JPS6331946B2 - - Google Patents
Info
- Publication number
- JPS6331946B2 JPS6331946B2 JP54044637A JP4463779A JPS6331946B2 JP S6331946 B2 JPS6331946 B2 JP S6331946B2 JP 54044637 A JP54044637 A JP 54044637A JP 4463779 A JP4463779 A JP 4463779A JP S6331946 B2 JPS6331946 B2 JP S6331946B2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- semiconductor substrate
- main surface
- semiconductor
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4463779A JPS55138261A (en) | 1979-04-12 | 1979-04-12 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4463779A JPS55138261A (en) | 1979-04-12 | 1979-04-12 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55138261A JPS55138261A (en) | 1980-10-28 |
| JPS6331946B2 true JPS6331946B2 (no) | 1988-06-27 |
Family
ID=12696935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4463779A Granted JPS55138261A (en) | 1979-04-12 | 1979-04-12 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55138261A (no) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4921983A (no) * | 1972-06-19 | 1974-02-26 | ||
| JPS5082981A (no) * | 1973-08-29 | 1975-07-04 | ||
| JPS535488U (no) * | 1976-07-01 | 1978-01-18 | ||
| JPS5346290A (en) * | 1976-10-08 | 1978-04-25 | Toshiba Corp | Semiconductor device |
| JPS5515204A (en) * | 1978-07-19 | 1980-02-02 | Toshiba Corp | Manufacturing method for contact type semiconductor device |
-
1979
- 1979-04-12 JP JP4463779A patent/JPS55138261A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4921983A (no) * | 1972-06-19 | 1974-02-26 | ||
| JPS5082981A (no) * | 1973-08-29 | 1975-07-04 | ||
| JPS535488U (no) * | 1976-07-01 | 1978-01-18 | ||
| JPS5346290A (en) * | 1976-10-08 | 1978-04-25 | Toshiba Corp | Semiconductor device |
| JPS5515204A (en) * | 1978-07-19 | 1980-02-02 | Toshiba Corp | Manufacturing method for contact type semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55138261A (en) | 1980-10-28 |
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