JPS6329785B2 - - Google Patents

Info

Publication number
JPS6329785B2
JPS6329785B2 JP55157008A JP15700880A JPS6329785B2 JP S6329785 B2 JPS6329785 B2 JP S6329785B2 JP 55157008 A JP55157008 A JP 55157008A JP 15700880 A JP15700880 A JP 15700880A JP S6329785 B2 JPS6329785 B2 JP S6329785B2
Authority
JP
Japan
Prior art keywords
electron beam
energy
sample
analysis
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55157008A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5780649A (en
Inventor
Shigeto Sunakozawa
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55157008A priority Critical patent/JPS5780649A/ja
Priority to US06/318,404 priority patent/US4480220A/en
Priority to NL8105041A priority patent/NL8105041A/nl
Publication of JPS5780649A publication Critical patent/JPS5780649A/ja
Publication of JPS6329785B2 publication Critical patent/JPS6329785B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP55157008A 1980-11-10 1980-11-10 Electron ray energy analyzer Granted JPS5780649A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP55157008A JPS5780649A (en) 1980-11-10 1980-11-10 Electron ray energy analyzer
US06/318,404 US4480220A (en) 1980-11-10 1981-11-05 Electron energy analyzing apparatus
NL8105041A NL8105041A (nl) 1980-11-10 1981-11-06 Elektronenenergie-analysator.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55157008A JPS5780649A (en) 1980-11-10 1980-11-10 Electron ray energy analyzer

Publications (2)

Publication Number Publication Date
JPS5780649A JPS5780649A (en) 1982-05-20
JPS6329785B2 true JPS6329785B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-15

Family

ID=15640157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55157008A Granted JPS5780649A (en) 1980-11-10 1980-11-10 Electron ray energy analyzer

Country Status (3)

Country Link
US (1) US4480220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5780649A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL8105041A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427455A1 (de) * 1984-07-25 1986-01-30 Siemens AG, 1000 Berlin und 8000 München Schaltungsanordnung zur vermeidung von einbrennerscheinungen auf dem bildschirm eines sichtgeraetes
US4717826A (en) * 1986-06-26 1988-01-05 Spectro-Scan, Inc. Method for determining intracellular mineral levels
US5382895A (en) * 1992-12-28 1995-01-17 Regents Of The University Of California System for tomographic determination of the power distribution in electron beams
US5583427A (en) * 1992-12-28 1996-12-10 Regents Of The University Of California Tomographic determination of the power distribution in electron beams
US6005381A (en) * 1997-10-21 1999-12-21 Kohler Co. Electrical signal phase detector
JP4449573B2 (ja) * 1999-01-04 2010-04-14 株式会社日立製作所 元素マッピング装置，走査透過型電子顕微鏡および元素マッピング方法
WO2000041206A1 (fr) 1999-01-04 2000-07-13 Hitachi, Ltd. Dispositif de mappage d'elements, microscope electronique a transmission et a balayage, et procede associe
JP4045058B2 (ja) * 1999-11-22 2008-02-13 株式会社日立製作所 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡
JP4006165B2 (ja) * 2000-04-21 2007-11-14 株式会社日立製作所 元素分析装置及び走査透過型電子顕微鏡並びに元素分析方法
WO2003038418A1 (fr) 2001-11-02 2003-05-08 Hitachi, Ltd. Dispositif d'analyses d'elements, microscope electronique a emission par balayage et procede d'analyses d'elements

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2220871B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-07-27 1978-01-20 Jeol Ltd
JPS532755B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-08-22 1978-01-31
JPS5443918B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-02-20 1979-12-22
JPS5280887A (en) * 1975-12-27 1977-07-06 Jeol Ltd Scanned image display
US4109168A (en) * 1977-01-19 1978-08-22 Analog Technology Corporation Current-to-frequency converter
JPS5425836A (en) * 1977-07-29 1979-02-27 Iwatsu Electric Co Ltd Cutting mechanism for rolled photosensitive paper in electrophotographic copier
JPS55115252A (en) * 1979-02-28 1980-09-05 Jeol Ltd Analytical electron microscope

Also Published As

Publication number Publication date
NL8105041A (nl) 1982-06-01
JPS5780649A (en) 1982-05-20
US4480220A (en) 1984-10-30

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