NL8105041A - Elektronenenergie-analysator. - Google Patents

Elektronenenergie-analysator. Download PDF

Info

Publication number
NL8105041A
NL8105041A NL8105041A NL8105041A NL8105041A NL 8105041 A NL8105041 A NL 8105041A NL 8105041 A NL8105041 A NL 8105041A NL 8105041 A NL8105041 A NL 8105041A NL 8105041 A NL8105041 A NL 8105041A
Authority
NL
Netherlands
Prior art keywords
energy
sample
electrons
electron beam
signal
Prior art date
Application number
NL8105041A
Other languages
English (en)
Dutch (nl)
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL8105041A publication Critical patent/NL8105041A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL8105041A 1980-11-10 1981-11-06 Elektronenenergie-analysator. NL8105041A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP55157008A JPS5780649A (en) 1980-11-10 1980-11-10 Electron ray energy analyzer
JP15700880 1980-11-10

Publications (1)

Publication Number Publication Date
NL8105041A true NL8105041A (nl) 1982-06-01

Family

ID=15640157

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8105041A NL8105041A (nl) 1980-11-10 1981-11-06 Elektronenenergie-analysator.

Country Status (3)

Country Link
US (1) US4480220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5780649A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL8105041A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427455A1 (de) * 1984-07-25 1986-01-30 Siemens AG, 1000 Berlin und 8000 München Schaltungsanordnung zur vermeidung von einbrennerscheinungen auf dem bildschirm eines sichtgeraetes
US4717826A (en) * 1986-06-26 1988-01-05 Spectro-Scan, Inc. Method for determining intracellular mineral levels
US5583427A (en) * 1992-12-28 1996-12-10 Regents Of The University Of California Tomographic determination of the power distribution in electron beams
US5382895A (en) * 1992-12-28 1995-01-17 Regents Of The University Of California System for tomographic determination of the power distribution in electron beams
US6005381A (en) * 1997-10-21 1999-12-21 Kohler Co. Electrical signal phase detector
JP3687541B2 (ja) 1999-01-04 2005-08-24 株式会社日立製作所 元素マッピング装置、走査透過型電子顕微鏡および元素マッピング方法
JP4449573B2 (ja) * 1999-01-04 2010-04-14 株式会社日立製作所 元素マッピング装置，走査透過型電子顕微鏡および元素マッピング方法
JP4045058B2 (ja) * 1999-11-22 2008-02-13 株式会社日立製作所 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡
JP4006165B2 (ja) * 2000-04-21 2007-11-14 株式会社日立製作所 元素分析装置及び走査透過型電子顕微鏡並びに元素分析方法
WO2003038418A1 (fr) 2001-11-02 2003-05-08 Hitachi, Ltd. Dispositif d'analyses d'elements, microscope electronique a emission par balayage et procede d'analyses d'elements

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
JPS532755B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-08-22 1978-01-31
JPS5443918B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-02-20 1979-12-22
JPS5280887A (en) * 1975-12-27 1977-07-06 Jeol Ltd Scanned image display
US4109168A (en) * 1977-01-19 1978-08-22 Analog Technology Corporation Current-to-frequency converter
JPS5425836A (en) * 1977-07-29 1979-02-27 Iwatsu Electric Co Ltd Cutting mechanism for rolled photosensitive paper in electrophotographic copier
JPS55115252A (en) * 1979-02-28 1980-09-05 Jeol Ltd Analytical electron microscope

Also Published As

Publication number Publication date
JPS6329785B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-15
US4480220A (en) 1984-10-30
JPS5780649A (en) 1982-05-20

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Legal Events

Date Code Title Description
A1A A request for search or an international-type search has been filed
BB A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
BV The patent application has lapsed