JPS6329743Y2 - - Google Patents

Info

Publication number
JPS6329743Y2
JPS6329743Y2 JP1984025915U JP2591584U JPS6329743Y2 JP S6329743 Y2 JPS6329743 Y2 JP S6329743Y2 JP 1984025915 U JP1984025915 U JP 1984025915U JP 2591584 U JP2591584 U JP 2591584U JP S6329743 Y2 JPS6329743 Y2 JP S6329743Y2
Authority
JP
Japan
Prior art keywords
molecular beam
chamber
substrate
beam source
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984025915U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60140774U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2591584U priority Critical patent/JPS60140774U/ja
Publication of JPS60140774U publication Critical patent/JPS60140774U/ja
Application granted granted Critical
Publication of JPS6329743Y2 publication Critical patent/JPS6329743Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2591584U 1984-02-27 1984-02-27 分子線エピタキシヤル成長装置 Granted JPS60140774U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2591584U JPS60140774U (ja) 1984-02-27 1984-02-27 分子線エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2591584U JPS60140774U (ja) 1984-02-27 1984-02-27 分子線エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS60140774U JPS60140774U (ja) 1985-09-18
JPS6329743Y2 true JPS6329743Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-09

Family

ID=30521433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2591584U Granted JPS60140774U (ja) 1984-02-27 1984-02-27 分子線エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS60140774U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758687B2 (ja) * 1986-01-13 1995-06-21 住友電気工業株式会社 超高真空用反応性ガス加熱導入装置
JP2510340B2 (ja) * 1990-08-01 1996-06-26 大同ほくさん株式会社 Ｓｉ系結晶薄膜の製法
JPH0811718B2 (ja) * 1992-02-27 1996-02-07 大同ほくさん株式会社 ガスソース分子線エピタキシー装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-08-31 1982-09-06

Also Published As

Publication number Publication date
JPS60140774U (ja) 1985-09-18

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