JPS5740518Y2 - - Google Patents

Info

Publication number
JPS5740518Y2
JPS5740518Y2 JP11956278U JP11956278U JPS5740518Y2 JP S5740518 Y2 JPS5740518 Y2 JP S5740518Y2 JP 11956278 U JP11956278 U JP 11956278U JP 11956278 U JP11956278 U JP 11956278U JP S5740518 Y2 JPS5740518 Y2 JP S5740518Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11956278U
Other languages
Japanese (ja)
Other versions
JPS5537238U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11956278U priority Critical patent/JPS5740518Y2/ja
Publication of JPS5537238U publication Critical patent/JPS5537238U/ja
Application granted granted Critical
Publication of JPS5740518Y2 publication Critical patent/JPS5740518Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP11956278U 1978-08-31 1978-08-31 Expired JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11956278U JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-08-31 1978-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11956278U JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-08-31 1978-08-31

Publications (2)

Publication Number Publication Date
JPS5537238U JPS5537238U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-03-10
JPS5740518Y2 true JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-09-06

Family

ID=29074950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11956278U Expired JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-08-31 1978-08-31

Country Status (1)

Country Link
JP (1) JPS5740518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140774U (ja) * 1984-02-27 1985-09-18 富士通株式会社 分子線エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPS5537238U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-03-10

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