JPS63285947A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63285947A
JPS63285947A JP62121829A JP12182987A JPS63285947A JP S63285947 A JPS63285947 A JP S63285947A JP 62121829 A JP62121829 A JP 62121829A JP 12182987 A JP12182987 A JP 12182987A JP S63285947 A JPS63285947 A JP S63285947A
Authority
JP
Japan
Prior art keywords
mark
positioning
semiconductor device
semiconductor
positioning mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62121829A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571166B2 (enrdf_load_stackoverflow
Inventor
Kazutaka Ikeyama
池山　一孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP62121829A priority Critical patent/JPS63285947A/ja
Publication of JPS63285947A publication Critical patent/JPS63285947A/ja
Publication of JPH0571166B2 publication Critical patent/JPH0571166B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62121829A 1987-05-18 1987-05-18 半導体装置の製造方法 Granted JPS63285947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62121829A JPS63285947A (ja) 1987-05-18 1987-05-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62121829A JPS63285947A (ja) 1987-05-18 1987-05-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63285947A true JPS63285947A (ja) 1988-11-22
JPH0571166B2 JPH0571166B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=14820959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62121829A Granted JPS63285947A (ja) 1987-05-18 1987-05-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63285947A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5716889A (en) * 1996-05-29 1998-02-10 Mitsubishi Denki Kabushiki Kaisha Method of arranging alignment marks
US6005294A (en) * 1996-05-29 1999-12-21 Mitsubishi Denki Kabushiki Kaisha Method of arranging alignment marks

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5716889A (en) * 1996-05-29 1998-02-10 Mitsubishi Denki Kabushiki Kaisha Method of arranging alignment marks
US6005294A (en) * 1996-05-29 1999-12-21 Mitsubishi Denki Kabushiki Kaisha Method of arranging alignment marks

Also Published As

Publication number Publication date
JPH0571166B2 (enrdf_load_stackoverflow) 1993-10-06

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Legal Events

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