JPS6327305B2 - - Google Patents
Info
- Publication number
- JPS6327305B2 JPS6327305B2 JP56131237A JP13123781A JPS6327305B2 JP S6327305 B2 JPS6327305 B2 JP S6327305B2 JP 56131237 A JP56131237 A JP 56131237A JP 13123781 A JP13123781 A JP 13123781A JP S6327305 B2 JPS6327305 B2 JP S6327305B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- silicon
- sintered body
- density
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 45
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 42
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- 229920003257 polycarbosilane Polymers 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 11
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000001354 calcination Methods 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 43
- 229910052710 silicon Inorganic materials 0.000 description 40
- 239000010703 silicon Substances 0.000 description 40
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 18
- 238000000034 method Methods 0.000 description 18
- 238000011282 treatment Methods 0.000 description 15
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000002344 surface layer Substances 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 239000005011 phenolic resin Substances 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 235000011121 sodium hydroxide Nutrition 0.000 description 6
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229920001568 phenolic resin Polymers 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- XWROUVVQGRRRMF-UHFFFAOYSA-N F.O[N+]([O-])=O Chemical compound F.O[N+]([O-])=O XWROUVVQGRRRMF-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000012188 paraffin wax Substances 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000000346 nonvolatile oil Substances 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56131237A JPS5832070A (ja) | 1981-08-21 | 1981-08-21 | 高密度炭化けい素焼結体の製造方法 |
| GB08223926A GB2104103B (en) | 1981-08-21 | 1982-08-19 | Forming shaped silicon carbide bodies |
| FR8214392A FR2511665B1 (fr) | 1981-08-21 | 1982-08-20 | Procede de preparation d'un corps faconne en carbure de silicium |
| DE19823231100 DE3231100A1 (de) | 1981-08-21 | 1982-08-20 | Verfahren zur herstellung eines formkoerpers aus siliciumcarbid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56131237A JPS5832070A (ja) | 1981-08-21 | 1981-08-21 | 高密度炭化けい素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5832070A JPS5832070A (ja) | 1983-02-24 |
| JPS6327305B2 true JPS6327305B2 (de) | 1988-06-02 |
Family
ID=15053207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56131237A Granted JPS5832070A (ja) | 1981-08-21 | 1981-08-21 | 高密度炭化けい素焼結体の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5832070A (de) |
| DE (1) | DE3231100A1 (de) |
| FR (1) | FR2511665B1 (de) |
| GB (1) | GB2104103B (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4737327A (en) * | 1983-02-07 | 1988-04-12 | Kurosaki Refractories Co., Ltd. | Process for producing silicon carbide sintered product |
| JPS6016868A (ja) * | 1983-07-02 | 1985-01-28 | 黒崎窯業株式会社 | 炭化珪素焼結体の製造方法 |
| JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター |
| GB2177421B (en) * | 1985-05-20 | 1989-07-19 | Toshiba Ceramics Co | Sintered body of silicon carbide and method for manufacturing the same |
| US4833110A (en) * | 1986-09-16 | 1989-05-23 | Lanxide Technology Company, Lp | Method for producing composite ceramic structures |
| JP2620364B2 (ja) * | 1988-03-18 | 1997-06-11 | 本田技研工業株式会社 | セラミックス焼結体の製造方法 |
| JP2632218B2 (ja) * | 1989-07-20 | 1997-07-23 | 本田技研工業株式会社 | セラミック焼結体の製造方法 |
| GB2237819A (en) * | 1989-11-10 | 1991-05-15 | Atomic Energy Authority Uk | A method of producing a silicon carbide article |
| JPH05279123A (ja) * | 1992-02-04 | 1993-10-26 | Shin Etsu Chem Co Ltd | 半導体製造用炭化珪素質部材 |
| WO1994010101A1 (de) * | 1992-11-02 | 1994-05-11 | Lonza-Werke G.M.B.H. | Verfahren zur herstellung von formkörpern aus reaktionsgebundenem, siliciuminfiltriertem siliciumcarbid sowie pressmasse als zwischenprodukt |
| DE4400131A1 (de) * | 1994-01-05 | 1995-07-06 | Hoechst Ceram Tec Ag | Verfahren zum Herstellen von keramischen Bauteilen aus Siliziumcarbid |
| US5509555A (en) * | 1994-06-03 | 1996-04-23 | Massachusetts Institute Of Technology | Method for producing an article by pressureless reactive infiltration |
| JP5841392B2 (ja) * | 2011-09-30 | 2016-01-13 | 日本ファインセラミックス株式会社 | 複合材料の製造方法 |
| CN110790586B (zh) * | 2019-10-31 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | 一种反应烧结SiC陶瓷疏松芯部的致密化方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5260299A (en) * | 1975-10-03 | 1977-05-18 | Ford Motor Co | Method of molding silicon carbide article |
| JPS5416521A (en) * | 1977-07-07 | 1979-02-07 | Shinetsu Chemical Co | Method of making silicon carbide molded body |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1075489B (de) * | 1960-02-01 | |||
| US2938807A (en) * | 1957-08-13 | 1960-05-31 | James C Andersen | Method of making refractory bodies |
| FR1225235A (fr) * | 1959-05-13 | 1960-06-29 | Carborundum Co | Procédé de fabrication de pièces denses en carbure de silicium |
| US3205043A (en) * | 1962-04-04 | 1965-09-07 | Carborundum Co | Cold molded dense silicon carbide articles and method of making the same |
| GB1180918A (en) * | 1966-06-10 | 1970-02-11 | Atomic Energy Authority Uk | Improvements in or relating to the Manufacture of Dense Bodies of Silicon Carbide. |
| US3998646A (en) * | 1974-11-11 | 1976-12-21 | Norton Company | Process for forming high density silicon carbide |
| JPS5848505B2 (ja) * | 1976-02-26 | 1983-10-28 | 東北大学金属材料研究所長 | 主としてｓｉｃよりなるシリコンカ−バイド成形体の製造方法 |
-
1981
- 1981-08-21 JP JP56131237A patent/JPS5832070A/ja active Granted
-
1982
- 1982-08-19 GB GB08223926A patent/GB2104103B/en not_active Expired
- 1982-08-20 FR FR8214392A patent/FR2511665B1/fr not_active Expired
- 1982-08-20 DE DE19823231100 patent/DE3231100A1/de active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5260299A (en) * | 1975-10-03 | 1977-05-18 | Ford Motor Co | Method of molding silicon carbide article |
| JPS5416521A (en) * | 1977-07-07 | 1979-02-07 | Shinetsu Chemical Co | Method of making silicon carbide molded body |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2104103A (en) | 1983-03-02 |
| FR2511665A1 (fr) | 1983-02-25 |
| DE3231100A1 (de) | 1983-03-24 |
| DE3231100C2 (de) | 1991-05-16 |
| JPS5832070A (ja) | 1983-02-24 |
| GB2104103B (en) | 1986-02-12 |
| FR2511665B1 (fr) | 1986-10-17 |
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