FR2511665B1 - Procede de preparation d'un corps faconne en carbure de silicium - Google Patents

Procede de preparation d'un corps faconne en carbure de silicium

Info

Publication number
FR2511665B1
FR2511665B1 FR8214392A FR8214392A FR2511665B1 FR 2511665 B1 FR2511665 B1 FR 2511665B1 FR 8214392 A FR8214392 A FR 8214392A FR 8214392 A FR8214392 A FR 8214392A FR 2511665 B1 FR2511665 B1 FR 2511665B1
Authority
FR
France
Prior art keywords
preparing
silicon carbide
shaped body
shaped
carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8214392A
Other languages
English (en)
Other versions
FR2511665A1 (fr
Inventor
Yasushi Matsudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of FR2511665A1 publication Critical patent/FR2511665A1/fr
Application granted granted Critical
Publication of FR2511665B1 publication Critical patent/FR2511665B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
FR8214392A 1981-08-21 1982-08-20 Procede de preparation d'un corps faconne en carbure de silicium Expired FR2511665B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56131237A JPS5832070A (ja) 1981-08-21 1981-08-21 高密度炭化けい素焼結体の製造方法

Publications (2)

Publication Number Publication Date
FR2511665A1 FR2511665A1 (fr) 1983-02-25
FR2511665B1 true FR2511665B1 (fr) 1986-10-17

Family

ID=15053207

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8214392A Expired FR2511665B1 (fr) 1981-08-21 1982-08-20 Procede de preparation d'un corps faconne en carbure de silicium

Country Status (4)

Country Link
JP (1) JPS5832070A (fr)
DE (1) DE3231100A1 (fr)
FR (1) FR2511665B1 (fr)
GB (1) GB2104103B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737327A (en) * 1983-02-07 1988-04-12 Kurosaki Refractories Co., Ltd. Process for producing silicon carbide sintered product
JPS6016868A (ja) * 1983-07-02 1985-01-28 黒崎窯業株式会社 炭化珪素焼結体の製造方法
JPS6169116A (ja) * 1984-09-13 1986-04-09 Toshiba Ceramics Co Ltd シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター
GB2177421B (en) * 1985-05-20 1989-07-19 Toshiba Ceramics Co Sintered body of silicon carbide and method for manufacturing the same
US4833110A (en) * 1986-09-16 1989-05-23 Lanxide Technology Company, Lp Method for producing composite ceramic structures
JP2620364B2 (ja) * 1988-03-18 1997-06-11 本田技研工業株式会社 セラミックス焼結体の製造方法
JP2632218B2 (ja) * 1989-07-20 1997-07-23 本田技研工業株式会社 セラミック焼結体の製造方法
GB2237819A (en) * 1989-11-10 1991-05-15 Atomic Energy Authority Uk A method of producing a silicon carbide article
JPH05279123A (ja) * 1992-02-04 1993-10-26 Shin Etsu Chem Co Ltd 半導体製造用炭化珪素質部材
WO1994010101A1 (fr) * 1992-11-02 1994-05-11 Lonza-Werke G.M.B.H. Procede pour la fabrication de pieces moulees en carbure de silicium infiltre de silicium et lie par reaction ainsi que matiere a mouler par compression utilisee comme produit intermediaire
DE4400131A1 (de) * 1994-01-05 1995-07-06 Hoechst Ceram Tec Ag Verfahren zum Herstellen von keramischen Bauteilen aus Siliziumcarbid
US5509555A (en) * 1994-06-03 1996-04-23 Massachusetts Institute Of Technology Method for producing an article by pressureless reactive infiltration
JP5841392B2 (ja) * 2011-09-30 2016-01-13 日本ファインセラミックス株式会社 複合材料の製造方法
CN110790586B (zh) * 2019-10-31 2020-10-13 中国科学院长春光学精密机械与物理研究所 一种反应烧结SiC陶瓷疏松芯部的致密化方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1075489B (fr) * 1960-02-01
US2938807A (en) * 1957-08-13 1960-05-31 James C Andersen Method of making refractory bodies
FR1225235A (fr) * 1959-05-13 1960-06-29 Carborundum Co Procédé de fabrication de pièces denses en carbure de silicium
US3205043A (en) * 1962-04-04 1965-09-07 Carborundum Co Cold molded dense silicon carbide articles and method of making the same
GB1180918A (en) * 1966-06-10 1970-02-11 Atomic Energy Authority Uk Improvements in or relating to the Manufacture of Dense Bodies of Silicon Carbide.
US3998646A (en) * 1974-11-11 1976-12-21 Norton Company Process for forming high density silicon carbide
CA1067524A (fr) * 1975-10-03 1979-12-04 Jack E. Noakes Mode de profilage d'un element en carbure de silicium
JPS5848505B2 (ja) * 1976-02-26 1983-10-28 東北大学金属材料研究所長 主としてｓｉｃよりなるシリコンカ−バイド成形体の製造方法
JPS5924754B2 (ja) * 1977-07-07 1984-06-12 信越化学工業株式会社 炭化けい素成型体の製造方法

Also Published As

Publication number Publication date
DE3231100A1 (de) 1983-03-24
DE3231100C2 (fr) 1991-05-16
GB2104103A (en) 1983-03-02
GB2104103B (en) 1986-02-12
FR2511665A1 (fr) 1983-02-25
JPS5832070A (ja) 1983-02-24
JPS6327305B2 (fr) 1988-06-02

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Legal Events

Date Code Title Description
ST Notification of lapse