JPS63271970A - 炭化珪素ｍｉｓ構造 - Google Patents

炭化珪素ｍｉｓ構造

Info

Publication number
JPS63271970A
JPS63271970A JP62105613A JP10561387A JPS63271970A JP S63271970 A JPS63271970 A JP S63271970A JP 62105613 A JP62105613 A JP 62105613A JP 10561387 A JP10561387 A JP 10561387A JP S63271970 A JPS63271970 A JP S63271970A
Authority
JP
Japan
Prior art keywords
silicon carbide
mis structure
semiconductor
single crystal
mis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62105613A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556024B2 (cg-RX-API-DMAC7.html
Inventor
Atsuko Uemoto
植本　敦子
Akira Suzuki
彰 鈴木
Masaki Furukawa
勝紀 古川
Akitsugu Hatano
晃継 波多野
Mitsuhiro Shigeta
光浩 繁田
Yoshihisa Fujii
藤井　良久
Kenji Nakanishi
健司 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP62105613A priority Critical patent/JPS63271970A/ja
Publication of JPS63271970A publication Critical patent/JPS63271970A/ja
Publication of JPH0556024B2 publication Critical patent/JPH0556024B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325—Silicon carbide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/602—Heterojunction gate electrodes for FETs
JP62105613A 1987-04-28 1987-04-28 炭化珪素ｍｉｓ構造 Granted JPS63271970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62105613A JPS63271970A (ja) 1987-04-28 1987-04-28 炭化珪素ｍｉｓ構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62105613A JPS63271970A (ja) 1987-04-28 1987-04-28 炭化珪素ｍｉｓ構造

Publications (2)

Publication Number Publication Date
JPS63271970A true JPS63271970A (ja) 1988-11-09
JPH0556024B2 JPH0556024B2 (cg-RX-API-DMAC7.html) 1993-08-18

Family

ID=14412349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62105613A Granted JPS63271970A (ja) 1987-04-28 1987-04-28 炭化珪素ｍｉｓ構造

Country Status (1)

Country Link
JP (1) JPS63271970A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049950A (en) * 1987-07-14 1991-09-17 Sharp Kabushiki Kaisha MIS structure photosensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049950A (en) * 1987-07-14 1991-09-17 Sharp Kabushiki Kaisha MIS structure photosensor

Also Published As

Publication number Publication date
JPH0556024B2 (cg-RX-API-DMAC7.html) 1993-08-18

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