JPS63205974A - ジヨセフソン接合の製造方法 - Google Patents

ジヨセフソン接合の製造方法

Info

Publication number
JPS63205974A
JPS63205974A JP62037800A JP3780087A JPS63205974A JP S63205974 A JPS63205974 A JP S63205974A JP 62037800 A JP62037800 A JP 62037800A JP 3780087 A JP3780087 A JP 3780087A JP S63205974 A JPS63205974 A JP S63205974A
Authority
JP
Japan
Prior art keywords
metal
mask
film
etching
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62037800A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523510B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Mutsuo Hidaka
睦夫 日高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62037800A priority Critical patent/JPS63205974A/ja
Publication of JPS63205974A publication Critical patent/JPS63205974A/ja
Publication of JPH0523510B2 publication Critical patent/JPH0523510B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62037800A 1987-02-23 1987-02-23 ジヨセフソン接合の製造方法 Granted JPS63205974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62037800A JPS63205974A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62037800A JPS63205974A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の製造方法

Publications (2)

Publication Number Publication Date
JPS63205974A true JPS63205974A (ja) 1988-08-25
JPH0523510B2 JPH0523510B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-02

Family

ID=12507582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62037800A Granted JPS63205974A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の製造方法

Country Status (1)

Country Link
JP (1) JPS63205974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646582A (en) * 1979-09-21 1981-04-27 Mitsubishi Electric Corp Formation of pattern of filmlike article
JPS61263180A (ja) * 1985-05-16 1986-11-21 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646582A (en) * 1979-09-21 1981-04-27 Mitsubishi Electric Corp Formation of pattern of filmlike article
JPS61263180A (ja) * 1985-05-16 1986-11-21 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法

Also Published As

Publication number Publication date
JPH0523510B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-02

Similar Documents

Publication Publication Date Title
US10109673B2 (en) Double-masking technique for increasing fabrication yield in superconducting electronics
US4299679A (en) Method of producing Josephson elements of the tunneling junction type
US20240107899A1 (en) Superconducting vacuum-bridged josephson junctions
JPS63205974A (ja) ジヨセフソン接合の製造方法
JP2002299705A (ja) 微小面積トンネル接合の作製方法
JPS60208873A (ja) ジヨセフソン接合素子の製造方法
JPS61263179A (ja) ジヨセフソン接合素子の製造方法
JPS646542B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5840338B2 (ja) 半導体装置の製造法
JPS6394692A (ja) ジヨセフソン接合素子の製造方法
JPH0327521A (ja) Ｍｏｓ型トランジスタの製造方法
JPS6336547A (ja) 半導体装置の製造方法
JP2639838B2 (ja) 酸化物高温超伝導三端子素子の製造方法
JPH0567611A (ja) 半導体装置及びその製造方法
JPS58125880A (ja) ジヨセフソン接合素子
JPS61208879A (ja) ジヨセフソン集積回路の製造方法
JPH0634417B2 (ja) ジヨセフソン接合素子の製造方法
JPH02189986A (ja) ニオブ膜または窒化ニオブ膜の加工方法
JPS63224273A (ja) ジヨセフソン接合素子とその作製方法
JPS59124780A (ja) ジヨセフソン集積回路の製造方法
JPS6147679A (ja) ジヨセフソン接合素子の作製方法
JPS61229377A (ja) ジヨセフソン集積回路の製造方法
JPS60210887A (ja) ジヨセフソン接合素子の製造方法
JPS6396973A (ja) ジヨセフソン接合素子の製造方法
JPH01273313A (ja) パターニング方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term