JPS6319067B2 - - Google Patents

Info

Publication number

JPS6319067B2

JPS6319067B2 JP10303881A JP10303881A JPS6319067B2 JP S6319067 B2 JPS6319067 B2 JP S6319067B2 JP 10303881 A JP10303881 A JP 10303881A JP 10303881 A JP10303881 A JP 10303881A JP S6319067 B2 JPS6319067 B2 JP S6319067B2

Authority

JP

Japan

Prior art keywords

wire

film

temperature

semiconductor

heating element

Prior art date

1981-06-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000010438 heat treatment Methods 0.000 claims description 23
• 229910052751 metal Inorganic materials 0.000 claims description 15
• 239000002184 metal Substances 0.000 claims description 15
• 239000011888 foil Substances 0.000 claims description 14
• 238000001514 detection method Methods 0.000 claims description 12
• 239000004065 semiconductor Substances 0.000 claims description 12
• 230000020169 heat generation Effects 0.000 claims description 6
• 238000005530 etching Methods 0.000 claims description 5
• 239000000463 material Substances 0.000 claims description 2
• 230000001939 inductive effect Effects 0.000 claims 1
• 238000009413 insulation Methods 0.000 description 5
• 238000010586 diagram Methods 0.000 description 4
• 239000004698 Polyethylene Substances 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• -1 polyethylene Polymers 0.000 description 2
• 229920000573 polyethylene Polymers 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 239000004677 Nylon Substances 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 238000004458 analytical method Methods 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 230000006378 damage Effects 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000008021 deposition Effects 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 239000000976 ink Substances 0.000 description 1
• 229910052742 iron Inorganic materials 0.000 description 1
• 230000007257 malfunction Effects 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229910001120 nichrome Inorganic materials 0.000 description 1
• 229920001778 nylon Polymers 0.000 description 1
• 239000003973 paint Substances 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 238000003672 processing method Methods 0.000 description 1
• 239000011347 resin Substances 0.000 description 1
• 229920005989 resin Polymers 0.000 description 1
• 230000035939 shock Effects 0.000 description 1