JPS63185865A - 窒化ケイ素焼結体の製造法 - Google Patents
窒化ケイ素焼結体の製造法Info
- Publication number
- JPS63185865A JPS63185865A JP62016644A JP1664487A JPS63185865A JP S63185865 A JPS63185865 A JP S63185865A JP 62016644 A JP62016644 A JP 62016644A JP 1664487 A JP1664487 A JP 1664487A JP S63185865 A JPS63185865 A JP S63185865A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- silicon nitride
- nitride sintered
- silicon
- strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 229910000676 Si alloy Inorganic materials 0.000 claims description 6
- 238000010298 pulverizing process Methods 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 5
- 238000005121 nitriding Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000007545 Vickers hardness test Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62016644A JPS63185865A (ja) | 1987-01-27 | 1987-01-27 | 窒化ケイ素焼結体の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62016644A JPS63185865A (ja) | 1987-01-27 | 1987-01-27 | 窒化ケイ素焼結体の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63185865A true JPS63185865A (ja) | 1988-08-01 |
| JPH0511064B2 JPH0511064B2 (enrdf_load_stackoverflow) | 1993-02-12 |
Family
ID=11922060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62016644A Granted JPS63185865A (ja) | 1987-01-27 | 1987-01-27 | 窒化ケイ素焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185865A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01115872A (ja) * | 1987-10-29 | 1989-05-09 | Kurasawa Opt Ind Co Ltd | 窒化ケイ素セラミックス |
| JPH01226767A (ja) * | 1988-03-07 | 1989-09-11 | Hitachi Ltd | 導電材及びその製造法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5141011A (en) * | 1974-10-03 | 1976-04-06 | Tatsuro Kuratomi | 4 chitsuka 3 keisoseikeitaino seizoho |
| JPS623076A (ja) * | 1985-06-28 | 1987-01-09 | 京セラ株式会社 | 窒化珪素質焼結体の製造方法 |
-
1987
- 1987-01-27 JP JP62016644A patent/JPS63185865A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5141011A (en) * | 1974-10-03 | 1976-04-06 | Tatsuro Kuratomi | 4 chitsuka 3 keisoseikeitaino seizoho |
| JPS623076A (ja) * | 1985-06-28 | 1987-01-09 | 京セラ株式会社 | 窒化珪素質焼結体の製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01115872A (ja) * | 1987-10-29 | 1989-05-09 | Kurasawa Opt Ind Co Ltd | 窒化ケイ素セラミックス |
| JPH01226767A (ja) * | 1988-03-07 | 1989-09-11 | Hitachi Ltd | 導電材及びその製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511064B2 (enrdf_load_stackoverflow) | 1993-02-12 |
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