JPS631679B2 - - Google Patents
Info
- Publication number
- JPS631679B2 JPS631679B2 JP51069795A JP6979576A JPS631679B2 JP S631679 B2 JPS631679 B2 JP S631679B2 JP 51069795 A JP51069795 A JP 51069795A JP 6979576 A JP6979576 A JP 6979576A JP S631679 B2 JPS631679 B2 JP S631679B2
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- reflectance
- metal thin
- thin film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical compound [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6979576A JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6979576A JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52154403A JPS52154403A (en) | 1977-12-22 |
| JPS631679B2 true JPS631679B2 (da) | 1988-01-13 |
Family
ID=13413022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6979576A Granted JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52154403A (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253175U (da) * | 1988-10-12 | 1990-04-17 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI228718B (en) * | 2001-11-05 | 2005-03-01 | Tdk Corp | Manufacturing method and device of mold plate for information medium |
| JPWO2003077239A1 (ja) | 2002-03-11 | 2005-07-07 | Tdk株式会社 | フォトレジスト原盤の加工方法、記録媒体用原盤の製造方法、記録媒体の製造方法、フォトレジスト原盤、記録媒体用原盤及び記録媒体 |
-
1976
- 1976-06-16 JP JP6979576A patent/JPS52154403A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253175U (da) * | 1988-10-12 | 1990-04-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52154403A (en) | 1977-12-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0084534B1 (en) | High density recording medium and method for making same | |
| JP2005196953A (ja) | Ｃｄ及びｄｖｄにパターンを作成するためのスタンパを製造する方法及び装置 | |
| US4319252A (en) | Optical data storage and recording medium having a replaceable protective coverplate | |
| JPS61242832A (ja) | 光学的記録デイスクの製作方法 | |
| JPH03108141A (ja) | 高密度光ディスクの製造方法 | |
| GB2159299A (en) | Optical discs | |
| US4735878A (en) | Optically read recording medium and method for making same | |
| US5338178A (en) | Embossing metal hold | |
| US4629668A (en) | Optically read recording medium and method for making same | |
| JPS631679B2 (da) | ||
| JPS60173736A (ja) | 光学デイスク用スタンパの製造方法 | |
| JP2513228B2 (ja) | 光学的記録媒体の製造方法 | |
| JPS6055534A (ja) | 光学記録媒体の製造方法 | |
| SU420586A1 (ru) | Способ изготовления шкал и сеток | |
| JPS6120059B2 (da) | ||
| JPS6323244A (ja) | 光カ−ドの製造方法 | |
| JPS61105742A (ja) | 信号記録媒体 | |
| JP3068877B2 (ja) | 光ディスク原盤のグルーブ作製方法 | |
| JPS62291731A (ja) | 光情報記録体 | |
| JPS62287450A (ja) | 光カ−ドの製造方法 | |
| JPS598149A (ja) | 光学記録再生円盤の製造法 | |
| JP2554862B2 (ja) | 光情報記録体の製造方法 | |
| JPH0421940A (ja) | 光ディスク用マスタ原盤の製造方法 | |
| JP3235620B2 (ja) | スタンパの製造方法 | |
| JPS62214532A (ja) | スタンパの製造方法 |