JPS6316683B2 - - Google Patents

Info

Publication number
JPS6316683B2
JPS6316683B2 JP56090475A JP9047581A JPS6316683B2 JP S6316683 B2 JPS6316683 B2 JP S6316683B2 JP 56090475 A JP56090475 A JP 56090475A JP 9047581 A JP9047581 A JP 9047581A JP S6316683 B2 JPS6316683 B2 JP S6316683B2
Authority
JP
Japan
Prior art keywords
signal
circuit
length
points
threshold value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56090475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57204406A (en
Inventor
Masahiro Inoe
Seiichiro Satomura
Mitsuhisa Myazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP9047581A priority Critical patent/JPS57204406A/ja
Publication of JPS57204406A publication Critical patent/JPS57204406A/ja
Publication of JPS6316683B2 publication Critical patent/JPS6316683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP9047581A 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device Granted JPS57204406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9047581A JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9047581A JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Publications (2)

Publication Number Publication Date
JPS57204406A JPS57204406A (en) 1982-12-15
JPS6316683B2 true JPS6316683B2 (de) 1988-04-11

Family

ID=13999603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9047581A Granted JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Country Status (1)

Country Link
JP (1) JPS57204406A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPH0430489Y2 (de) * 1984-11-26 1992-07-23
JPH073776B2 (ja) * 1985-02-08 1995-01-18 株式会社日立製作所 測長用電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope

Also Published As

Publication number Publication date
JPS57204406A (en) 1982-12-15

Similar Documents

Publication Publication Date Title
US8502141B2 (en) Graphical user interface for use with electron beam wafer inspection
JP4573419B2 (ja) 非接触型外形測定装置
JPS6316683B2 (de)
JPS59761B2 (ja) 走査電子顕微鏡における距離測定装置
JPH1194531A (ja) 寸法測定装置及び寸法測定方法
JPS61211935A (ja) カラ−ブラウン管のコンバ−ゼンス量検出方法
JP2564359B2 (ja) パタ−ン検査方法及びパタ−ン測長方法並びに検査装置
JP2880003B2 (ja) 電子顕微鏡
JPS61220261A (ja) 試料表面の対象区域をわき立たせる方法と装置
US2873378A (en) Method of examining the quality of electron-optical images and devices for carrying out this method
JPH0219682Y2 (de)
JPH0430489Y2 (de)
JP2010015731A (ja) 走査型電子顕微鏡、および走査型電子顕微鏡における画像の改良方法
JPS5824726B2 (ja) 走査型測長装置
KR830002855B1 (ko) 주사 전자 현미경의 거리 측정장치
JPS594298Y2 (ja) 走査電子顕微鏡等の試料装置
JPH0576487A (ja) 電子内視鏡装置
JPS5993492A (ja) 陰極線表示管を用いた表示装置
JPS5838995B2 (ja) コンバ−ゼンスイロズレケンチホウホウ オヨビ ソノソウチ
JPH03254053A (ja) 一次電子着地誤差の補正方法
KR0167772B1 (ko) 콘버전스측정장치
JP2000123769A (ja) 試料に対する荷電粒子の焦点を調整する合焦制御方法
JPH05259239A (ja) 電子ビーム装置
JPS6318204A (ja) 測長装置
JPS61294749A (ja) パタン寸法測定方法