JPS57204406A - Measuring method of length using scanning-type electronic microscope and its device - Google Patents

Measuring method of length using scanning-type electronic microscope and its device

Info

Publication number
JPS57204406A
JPS57204406A JP9047581A JP9047581A JPS57204406A JP S57204406 A JPS57204406 A JP S57204406A JP 9047581 A JP9047581 A JP 9047581A JP 9047581 A JP9047581 A JP 9047581A JP S57204406 A JPS57204406 A JP S57204406A
Authority
JP
Japan
Prior art keywords
pattern
circuit
image
scanning
type electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9047581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316683B2 (de
Inventor
Masahiro Inoue
Seiichiro Satomura
Mitsuhisa Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP9047581A priority Critical patent/JPS57204406A/ja
Publication of JPS57204406A publication Critical patent/JPS57204406A/ja
Publication of JPS6316683B2 publication Critical patent/JPS6316683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP9047581A 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device Granted JPS57204406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9047581A JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9047581A JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Publications (2)

Publication Number Publication Date
JPS57204406A true JPS57204406A (en) 1982-12-15
JPS6316683B2 JPS6316683B2 (de) 1988-04-11

Family

ID=13999603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9047581A Granted JPS57204406A (en) 1981-06-12 1981-06-12 Measuring method of length using scanning-type electronic microscope and its device

Country Status (1)

Country Link
JP (1) JPS57204406A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS6194707U (de) * 1984-11-26 1986-06-18
JPS61183863A (ja) * 1985-02-08 1986-08-16 Hitachi Ltd 測長用電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS6194707U (de) * 1984-11-26 1986-06-18
JPH0430489Y2 (de) * 1984-11-26 1992-07-23
JPS61183863A (ja) * 1985-02-08 1986-08-16 Hitachi Ltd 測長用電子顕微鏡
JPH073776B2 (ja) * 1985-02-08 1995-01-18 株式会社日立製作所 測長用電子顕微鏡

Also Published As

Publication number Publication date
JPS6316683B2 (de) 1988-04-11

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