JPS6194707U - - Google Patents

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Publication number
JPS6194707U
JPS6194707U JP17953084U JP17953084U JPS6194707U JP S6194707 U JPS6194707 U JP S6194707U JP 17953084 U JP17953084 U JP 17953084U JP 17953084 U JP17953084 U JP 17953084U JP S6194707 U JPS6194707 U JP S6194707U
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JP
Japan
Prior art keywords
marker
scans
line width
sampling
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17953084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430489Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984179530U priority Critical patent/JPH0430489Y2/ja
Publication of JPS6194707U publication Critical patent/JPS6194707U/ja
Application granted granted Critical
Publication of JPH0430489Y2 publication Critical patent/JPH0430489Y2/ja
Expired legal-status Critical Current

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  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP1984179530U 1984-11-26 1984-11-26 Expired JPH0430489Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (de) 1984-11-26 1984-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (de) 1984-11-26 1984-11-26

Publications (2)

Publication Number Publication Date
JPS6194707U true JPS6194707U (de) 1986-06-18
JPH0430489Y2 JPH0430489Y2 (de) 1992-07-23

Family

ID=30737097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984179530U Expired JPH0430489Y2 (de) 1984-11-26 1984-11-26

Country Status (1)

Country Link
JP (1) JPH0430489Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Also Published As

Publication number Publication date
JPH0430489Y2 (de) 1992-07-23

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