JPS6194707U - - Google Patents

Info

Publication number
JPS6194707U
JPS6194707U JP17953084U JP17953084U JPS6194707U JP S6194707 U JPS6194707 U JP S6194707U JP 17953084 U JP17953084 U JP 17953084U JP 17953084 U JP17953084 U JP 17953084U JP S6194707 U JPS6194707 U JP S6194707U
Authority
JP
Japan
Prior art keywords
marker
scans
line width
sampling
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17953084U
Other languages
Japanese (ja)
Other versions
JPH0430489Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984179530U priority Critical patent/JPH0430489Y2/ja
Publication of JPS6194707U publication Critical patent/JPS6194707U/ja
Application granted granted Critical
Publication of JPH0430489Y2 publication Critical patent/JPH0430489Y2/ja
Expired legal-status Critical Current

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  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の観察画像の線幅測定装置の１
実施例構成を示す図、第２図はデイスプレイ上の
画像に重畳されるマーカーの例を示す図、第３図
は本考案の観察画像の線幅測定装置の動作を説明
するためのタイムチヤートである。 １…ＣＰＵ（中央処理装置）、２…インターフ
エイス、３…操作パネル、４…マーカー制御回路
、５…デイジタル・スキヤン・ジエネレータ、６
…走査回数指定回路、７…データ・アクイジシヨ
ン・システム、８…デイスプレイ、９…電子銃、
１０…収束レンズ、１１…偏向コイル、１２…対
物レンズ、１３…検出器、１４…試料。 Figure 1 shows one of the line width measuring devices for observation images of the present invention.
FIG. 2 is a diagram showing an example configuration of an embodiment, FIG. 2 is a diagram showing an example of markers superimposed on an image on a display, and FIG. 3 is a time chart for explaining the operation of the line width measuring device for observed images of the present invention. be. 1...CPU (central processing unit), 2...Interface, 3...Operation panel, 4...Marker control circuit, 5...Digital scan generator, 6
...Scanning number designation circuit, 7.Data acquisition system, 8.Display, 9.Electron gun,
DESCRIPTION OF SYMBOLS 10... Converging lens, 11... Deflection coil, 12... Objective lens, 13... Detector, 14... Sample.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子銃から射出される電子線を細いビームに収
束させてスキヤン信号に従つて試料上を二次元的
に走査するとともに試料から発生する量子信号を
検出して走査像を表示し該走査像の指定された表
示ラインの線幅を測定する観察画像の線幅測定装
置であつて、指定された表示ラインをマーカーに
より表示し該マーカーの位置とスキヤン位置との
一致を検出するマーカー制御手段、指定された走
査回数を判定する走査回数指定手段、及びマーカ
ー制御手段の一致信号により選択されたサンプリ
ング・クロツク信号によつてサンプリング・デー
タを取り込み走査回数指定手段の判定に従つて指
定された走査回数のサンプリング・データを積算
するサンプリング・データ積算手段を具備したこ
とを特徴とする観察画像の線幅測定装置。 The electron beam emitted from the electron gun is converged into a narrow beam, which scans the sample two-dimensionally according to the scan signal, detects the quantum signal generated from the sample, displays the scanned image, and specifies the scanned image. The observation image line width measuring device measures the line width of a specified display line, the apparatus comprising a marker control means for displaying a specified display line with a marker and detecting a coincidence between the position of the marker and the scan position; a scanning number designation means for determining the number of scans that have been performed; and sampling data is taken in by a sampling clock signal selected by a coincidence signal of the marker control means, and sampling is performed for the number of scans specified according to the determination of the scanning number designation means. - A line width measurement device for observed images, characterized by comprising a sampling data integration means for integrating data.
JP1984179530U 1984-11-26 1984-11-26 Expired JPH0430489Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (en) 1984-11-26 1984-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (en) 1984-11-26 1984-11-26

Publications (2)

Publication Number Publication Date
JPS6194707U true JPS6194707U (en) 1986-06-18
JPH0430489Y2 JPH0430489Y2 (en) 1992-07-23

Family

ID=30737097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984179530U Expired JPH0430489Y2 (en) 1984-11-26 1984-11-26

Country Status (1)

Country Link
JP (1) JPH0430489Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (en) * 2001-08-29 2007-01-11 Hitachi Ltd Sample dimension measuring method, and scanning electron microscope

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (en) * 1982-01-05 1983-07-13 Jeol Ltd Pattern measuring method
JPS59112217A (en) * 1982-11-29 1984-06-28 Toshiba Corp Size measuring device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (en) * 1982-01-05 1983-07-13 Jeol Ltd Pattern measuring method
JPS59112217A (en) * 1982-11-29 1984-06-28 Toshiba Corp Size measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (en) * 2001-08-29 2007-01-11 Hitachi Ltd Sample dimension measuring method, and scanning electron microscope

Also Published As

Publication number Publication date
JPH0430489Y2 (en) 1992-07-23

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