JPS6426129A - Ic pattern inspecting device using electron microscope - Google Patents

Ic pattern inspecting device using electron microscope

Info

Publication number
JPS6426129A
JPS6426129A JP62182951A JP18295187A JPS6426129A JP S6426129 A JPS6426129 A JP S6426129A JP 62182951 A JP62182951 A JP 62182951A JP 18295187 A JP18295187 A JP 18295187A JP S6426129 A JPS6426129 A JP S6426129A
Authority
JP
Japan
Prior art keywords
pattern
detected
crt
image
displayed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62182951A
Other languages
Japanese (ja)
Inventor
Takaaki Shinkawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62182951A priority Critical patent/JPS6426129A/en
Publication of JPS6426129A publication Critical patent/JPS6426129A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To accurately detect a pattern position at all times and to display an IC pattern image on a screen by sampling the detected IC pattern image at plural points along the image and counting up by one when a pattern edge is detected. CONSTITUTION:An electron beam 2 emitted by an electron gun 2 is scanned in two dimensions with a signal from a scanning signal generating circuit 8 and a secondary electron emitted by a sample 4 is detected by a detector 13 and displayed on a CRT 20. Then X and Y position signals from the scanning signal generating circuit 8 are applied to a comparator 9, which generates an output at a position coincident with X and Y position signals from the pointer 10 of a mouse 21, thereby controlling a window 15. Therefore, a detection signal within a specific range from the sample 4 moved by a stage driver 6 is stored in a memory 16. Then a counter 18 counts up every time a detection signal is obtained from a peak detector 17, and the number of patterns or pattern edges is displayed on the CRT.
JP62182951A 1987-07-22 1987-07-22 Ic pattern inspecting device using electron microscope Pending JPS6426129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182951A JPS6426129A (en) 1987-07-22 1987-07-22 Ic pattern inspecting device using electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182951A JPS6426129A (en) 1987-07-22 1987-07-22 Ic pattern inspecting device using electron microscope

Publications (1)

Publication Number Publication Date
JPS6426129A true JPS6426129A (en) 1989-01-27

Family

ID=16127204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182951A Pending JPS6426129A (en) 1987-07-22 1987-07-22 Ic pattern inspecting device using electron microscope

Country Status (1)

Country Link
JP (1) JPS6426129A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04196145A (en) * 1990-11-26 1992-07-15 Matsushita Electric Ind Co Ltd Method of detecting pitch of lead of electronic component and number thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04196145A (en) * 1990-11-26 1992-07-15 Matsushita Electric Ind Co Ltd Method of detecting pitch of lead of electronic component and number thereof

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