JPS54143061A - Display unit for sample image of scanning electron microscope or the like - Google Patents
Display unit for sample image of scanning electron microscope or the likeInfo
- Publication number
- JPS54143061A JPS54143061A JP5083178A JP5083178A JPS54143061A JP S54143061 A JPS54143061 A JP S54143061A JP 5083178 A JP5083178 A JP 5083178A JP 5083178 A JP5083178 A JP 5083178A JP S54143061 A JPS54143061 A JP S54143061A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- mark
- length
- screen
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To simplify the measurement of the distance in a tilting sample image by displaying two length marks on the screen of the image displaying method of a Braun tube, etc., and by correcting either mark in terms of a sample slant.
CONSTITUTION: Electron beam 2 emitted from electron gun 1 strikes sample 5. Since the scan of this electron beam 2 synchronizes with the screen scan of Braun tube 8, the luminance-modulated scanning image of the sample surface appears on the screen. To display the magnification of the picture, X-directional mark M1 and Y-directional mark M2 are both displayed at the corner of the screen of Braun tube 8. The length of mark M1 is dispalyed being overlapped with the scanning image of the sample by applying a display signal fit to the fixed magnification from magnification control circuit 17 to length display method 22. For the length of mark M2, on the other hand, a signal is used which corresponds to a tilt angle generated by sample tilting method 33 provided to simple moving mechanism 20, so that the length of mark M2 will be displayed being shortened corresponding to the tilt angle of the sample.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5083178A JPS54143061A (en) | 1978-04-28 | 1978-04-28 | Display unit for sample image of scanning electron microscope or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5083178A JPS54143061A (en) | 1978-04-28 | 1978-04-28 | Display unit for sample image of scanning electron microscope or the like |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54143061A true JPS54143061A (en) | 1979-11-07 |
Family
ID=12869696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5083178A Pending JPS54143061A (en) | 1978-04-28 | 1978-04-28 | Display unit for sample image of scanning electron microscope or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54143061A (en) |
-
1978
- 1978-04-28 JP JP5083178A patent/JPS54143061A/en active Pending
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