JPS63166247A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63166247A
JPS63166247A JP31557586A JP31557586A JPS63166247A JP S63166247 A JPS63166247 A JP S63166247A JP 31557586 A JP31557586 A JP 31557586A JP 31557586 A JP31557586 A JP 31557586A JP S63166247 A JPS63166247 A JP S63166247A
Authority
JP
Japan
Prior art keywords
film
silicon film
polycrystalline silicon
manufacturing
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31557586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH036655B2 (de
Inventor
Yuichi Mikata
見方　裕一
Katsunori Ishihara
石原　勝則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP31557586A priority Critical patent/JPS63166247A/ja
Publication of JPS63166247A publication Critical patent/JPS63166247A/ja
Publication of JPH036655B2 publication Critical patent/JPH036655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP31557586A 1986-12-26 1986-12-26 半導体装置の製造方法 Granted JPS63166247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31557586A JPS63166247A (ja) 1986-12-26 1986-12-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31557586A JPS63166247A (ja) 1986-12-26 1986-12-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63166247A true JPS63166247A (ja) 1988-07-09
JPH036655B2 JPH036655B2 (de) 1991-01-30

Family

ID=18066994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31557586A Granted JPS63166247A (ja) 1986-12-26 1986-12-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63166247A (de)

Also Published As

Publication number Publication date
JPH036655B2 (de) 1991-01-30

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Legal Events

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