JPS6315739B2 - - Google Patents

Info

Publication number
JPS6315739B2
JPS6315739B2 JP53000241A JP24178A JPS6315739B2 JP S6315739 B2 JPS6315739 B2 JP S6315739B2 JP 53000241 A JP53000241 A JP 53000241A JP 24178 A JP24178 A JP 24178A JP S6315739 B2 JPS6315739 B2 JP S6315739B2
Authority
JP
Japan
Prior art keywords
mask
alignment pattern
wafer
alignment
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53000241A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5493974A (en
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24178A priority Critical patent/JPS5493974A/ja
Publication of JPS5493974A publication Critical patent/JPS5493974A/ja
Publication of JPS6315739B2 publication Critical patent/JPS6315739B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP24178A 1978-01-06 1978-01-06 Projection-system mask alignment unit Granted JPS5493974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24178A JPS5493974A (en) 1978-01-06 1978-01-06 Projection-system mask alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24178A JPS5493974A (en) 1978-01-06 1978-01-06 Projection-system mask alignment unit

Publications (2)

Publication Number Publication Date
JPS5493974A JPS5493974A (en) 1979-07-25
JPS6315739B2 true JPS6315739B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-06

Family

ID=11468462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24178A Granted JPS5493974A (en) 1978-01-06 1978-01-06 Projection-system mask alignment unit

Country Status (1)

Country Link
JP (1) JPS5493974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
JPS56102823A (en) * 1980-01-19 1981-08-17 Nippon Kogaku Kk <Nikon> Positioning device
DD158824A1 (de) * 1980-11-03 1983-02-02 Adelbrecht Schorcht Anordnung zur automatischen justierung mindestens eines gegenstandes
JPS57138134A (en) * 1981-02-20 1982-08-26 Nippon Kogaku Kk <Nikon> Positioning device
JPS5825638A (ja) * 1981-08-08 1983-02-15 Canon Inc 露光装置
JPS59119411U (ja) * 1983-01-28 1984-08-11 日本電気ホームエレクトロニクス株式会社 投影露光装置
JPS603620A (ja) * 1983-06-21 1985-01-10 Mitsubishi Electric Corp 微細パタ−ンの形成方法
US4652134A (en) * 1984-08-28 1987-03-24 Lsi Logic Corporation Mask alignment system
JPS63153821A (ja) * 1987-10-27 1988-06-27 Nikon Corp 位置合わせ装置
JP2924635B2 (ja) * 1994-03-16 1999-07-26 日本電気株式会社 半導体素子製造用レチクルおよび露光装置の製造誤差の補正方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-05-18 1974-02-08
JPS4928362A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-07-05 1974-03-13
JPS52109875A (en) * 1976-02-25 1977-09-14 Hitachi Ltd Position matching system for mask and wafer and its unit

Also Published As

Publication number Publication date
JPS5493974A (en) 1979-07-25

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