JPS6314810B2 - - Google Patents

Info

Publication number
JPS6314810B2
JPS6314810B2 JP57126080A JP12608082A JPS6314810B2 JP S6314810 B2 JPS6314810 B2 JP S6314810B2 JP 57126080 A JP57126080 A JP 57126080A JP 12608082 A JP12608082 A JP 12608082A JP S6314810 B2 JPS6314810 B2 JP S6314810B2
Authority
JP
Japan
Prior art keywords
field
sample
view
deflection
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57126080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5916256A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57126080A priority Critical patent/JPS5916256A/ja
Publication of JPS5916256A publication Critical patent/JPS5916256A/ja
Publication of JPS6314810B2 publication Critical patent/JPS6314810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57126080A 1982-07-20 1982-07-20 電子顕微鏡における視野設定装置 Granted JPS5916256A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57126080A JPS5916256A (ja) 1982-07-20 1982-07-20 電子顕微鏡における視野設定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57126080A JPS5916256A (ja) 1982-07-20 1982-07-20 電子顕微鏡における視野設定装置

Publications (2)

Publication Number Publication Date
JPS5916256A JPS5916256A (ja) 1984-01-27
JPS6314810B2 true JPS6314810B2 (enrdf_load_stackoverflow) 1988-04-01

Family

ID=14926109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57126080A Granted JPS5916256A (ja) 1982-07-20 1982-07-20 電子顕微鏡における視野設定装置

Country Status (1)

Country Link
JP (1) JPS5916256A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599064A (ja) * 1991-10-04 1993-04-20 Kubota Corp 空冷多気筒頭上弁エンジンのシリンダヘツド
KR20140064084A (ko) * 2012-11-19 2014-05-28 삼성테크윈 주식회사 이오나이저 시스템

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2673900B2 (ja) * 1988-12-05 1997-11-05 株式会社日立製作所 電子顕微鏡
JP5084528B2 (ja) * 2008-01-24 2012-11-28 日本電子株式会社 電子顕微鏡の制御装置及び制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599064A (ja) * 1991-10-04 1993-04-20 Kubota Corp 空冷多気筒頭上弁エンジンのシリンダヘツド
KR20140064084A (ko) * 2012-11-19 2014-05-28 삼성테크윈 주식회사 이오나이저 시스템

Also Published As

Publication number Publication date
JPS5916256A (ja) 1984-01-27

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