JPS6314371Y2 - - Google Patents
Info
- Publication number
- JPS6314371Y2 JPS6314371Y2 JP9924481U JP9924481U JPS6314371Y2 JP S6314371 Y2 JPS6314371 Y2 JP S6314371Y2 JP 9924481 U JP9924481 U JP 9924481U JP 9924481 U JP9924481 U JP 9924481U JP S6314371 Y2 JPS6314371 Y2 JP S6314371Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gas
- branch point
- filter
- cut valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9924481U JPS5823158U (ja) | 1981-07-03 | 1981-07-03 | 電子線装置等のガス導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9924481U JPS5823158U (ja) | 1981-07-03 | 1981-07-03 | 電子線装置等のガス導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5823158U JPS5823158U (ja) | 1983-02-14 |
| JPS6314371Y2 true JPS6314371Y2 (enrdf_load_stackoverflow) | 1988-04-22 |
Family
ID=29893985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9924481U Granted JPS5823158U (ja) | 1981-07-03 | 1981-07-03 | 電子線装置等のガス導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5823158U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4930754B2 (ja) | 2006-01-25 | 2012-05-16 | エスアイアイ・ナノテクノロジー株式会社 | 荷電粒子ビーム装置 |
-
1981
- 1981-07-03 JP JP9924481U patent/JPS5823158U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5823158U (ja) | 1983-02-14 |
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