JPS5823158U - 電子線装置等のガス導入装置 - Google Patents

電子線装置等のガス導入装置

Info

Publication number
JPS5823158U
JPS5823158U JP9924481U JP9924481U JPS5823158U JP S5823158 U JPS5823158 U JP S5823158U JP 9924481 U JP9924481 U JP 9924481U JP 9924481 U JP9924481 U JP 9924481U JP S5823158 U JPS5823158 U JP S5823158U
Authority
JP
Japan
Prior art keywords
equipment
electron beam
cut valve
gas
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9924481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314371Y2 (enrdf_load_stackoverflow
Inventor
玉井　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP9924481U priority Critical patent/JPS5823158U/ja
Publication of JPS5823158U publication Critical patent/JPS5823158U/ja
Application granted granted Critical
Publication of JPS6314371Y2 publication Critical patent/JPS6314371Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9924481U 1981-07-03 1981-07-03 電子線装置等のガス導入装置 Granted JPS5823158U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9924481U JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9924481U JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Publications (2)

Publication Number Publication Date
JPS5823158U true JPS5823158U (ja) 1983-02-14
JPS6314371Y2 JPS6314371Y2 (enrdf_load_stackoverflow) 1988-04-22

Family

ID=29893985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9924481U Granted JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Country Status (1)

Country Link
JP (1) JPS5823158U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086254A1 (ja) * 2006-01-25 2007-08-02 Sii Nanotechnology Inc. 荷電粒子ビーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086254A1 (ja) * 2006-01-25 2007-08-02 Sii Nanotechnology Inc. 荷電粒子ビーム装置
US7804066B2 (en) 2006-01-25 2010-09-28 Sii Nanotechnology Inc. Charged-particle beam apparatus

Also Published As

Publication number Publication date
JPS6314371Y2 (enrdf_load_stackoverflow) 1988-04-22

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