JPS6314056B2 - - Google Patents

Info

Publication number
JPS6314056B2
JPS6314056B2 JP57006061A JP606182A JPS6314056B2 JP S6314056 B2 JPS6314056 B2 JP S6314056B2 JP 57006061 A JP57006061 A JP 57006061A JP 606182 A JP606182 A JP 606182A JP S6314056 B2 JPS6314056 B2 JP S6314056B2
Authority
JP
Japan
Prior art keywords
weight
alloy
copper
strength
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57006061A
Other languages
Japanese (ja)
Other versions
JPS58124254A (en
Inventor
Masahiro Tsuji
Michiharu Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining Co Ltd filed Critical Nippon Mining Co Ltd
Priority to JP606182A priority Critical patent/JPS58124254A/en
Publication of JPS58124254A publication Critical patent/JPS58124254A/en
Publication of JPS6314056B2 publication Critical patent/JPS6314056B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Conductive Materials (AREA)

Description

【発明の詳細な説明】 本発明はトランジスタや集積回路(IC)など
の半導体機器のリード材に適する銅合金に関する
ものである。 従来、半導体機器のリード材としては熱膨張係
数が低く、素子およびセラミツクスとの接着およ
び封着性の良好なコバール合金、42合金などの高
ニツケル合金が好んで使われてきた。しかし近年
半導体回路の集積度の向上に伴い消費電力の高い
ICが多くなつたきたことと、封止材料として樹
脂が多く使用され、かつ素子とリードフレームの
接着もペーストが多く用いられたことにより、使
用されるリード材も放熱性のよい銅基合金が使わ
れるようになつてきた。しかし、リード材として
は熱伝導性が良い。耐熱性が良い、ハンダ付け
性・メツキ密着性が良い。強度が高い、廉価であ
る等の広範な諸条件を全て満足する必要がある。
従来より使用されている無酸素銅、すず入り銅、
りん青銅、鉄入り銅などの銅基合金は何れも一長
一短があり、必ずしも満足し得るものではない。
たとえば無酸素銅では強度、耐熱性が低く、すず
入り銅、鉄入り銅では強度的に満足できず、りん
青銅では熱伝導性、耐熱性が低いという欠点を有
している。かかる点に鑑み、従来の銅基合金のも
つ欠点を改良し、半導体機器のリード材として好
適な諸特性を有する銅合金としてCu−Ni−Si合
金が提供されているが、強度的に完全に満足でき
るものではないので、本発明はCu−Ni−Si合金
をさらに改良し、半導体機器のリード材としてよ
り優れた諸特性を有する銅合金を提供しようとす
るものである。 本発明は (1) Ni;1.0超〜4.0重量%、Si;0.3超〜1.0重量
%を含み残部が銅および不可避的な不純物から
なる合金に副成分として As;0.001〜0.1重量%、 Sb;0.001〜0.1重量%、 Fe;0.01〜1.0重量%、 Co;0.01〜1.0重量%、 Cr;0.01〜1.0重量%、 Al;0.01〜1.0重量%、 Ti;0.01〜1.0重量%、 Zr;0.01〜1.0重量%、 Mg;0.01〜1.0重量%、 Zn;0.01〜1.0重量%、 からなる群より選択された1種以上を総量で
0.001〜2.0重量%添加した組成を有することを
特徴とする半導体機器のリード材用銅合金。 (2) Ni;1.0超〜4.0重量%、Si;0.3超〜1.0重量
%を含み、酸素含有量が10ppm以下で残部が銅
および不可避的な不純物からなる合金に副成分
として As;0.001〜0.1重量%、 Sb;0.001〜0.1重量%、 Fe;0.01〜1.0重量%、 Co;0.01〜1.0重量%、 Cr;0.01〜1.0重量%、 Al;0.01〜1.0重量%、 Ti;0.01〜1.0重量%、 Zr;0.01〜1.0重量%、 Mg;0.01〜1.0重量%、 Zn;0.01〜1.0重量%、 からなる群より選択された1種以上を総量で
0.001〜2.0重量%添加した組成を有することを
特徴とする半導体機器のリード材用銅合金であ
る。本発明に係る合金はリード材に要求される
放熱性、耐熱性、強度、ハンダ付け性、メツキ
密着性等のすべてが良好なるものである。 次に本発明合金を構成する合金成分の限定理由
を説明する。Niは所定量のSiと共に添加するこ
とにより、本発明合金の強度を高め、しかも高導
電性を維持する効果があるが、Ni含有量が1.0重
量%以下では、リードフレーム材の中でも、特に
強度を必要とするリードフレーム材においては強
度が不十分である。またNi含有量が4.0重量%を
超えると加工性およびハンダ付け性が低下して好
ましくない。Siの含有量を0.3重量%を超え、1.0
重量%以下とする理由は、Siの含有量が0.3重量
%以下ではNiを共添してもリードフレーム材の
中で特に高強度を必要とするリードフレーム材に
おいては強度が不十分であり、Si含有量が1.0重
量%を超えると加工性が急速に悪化し、またハン
ダ付け性も低下するので、上記1.0重量%を上限
とする範囲におさえる必要がある。 さらに副成分としてAs、Sb、Fe、Co、Or、
Al、Ti、Zr、Mg、Znからなる群より選択され
た1種以上の総量が0.001重量%未満では、高強
度でかつ耐食性のある合金が得られず、また2.0
重量%を超えると導電性の低下およびハンダ付け
性の低下が著しくなる為である。また、酸素含有
量を10ppm以下とした理由は、酸素含有量を
10ppm以下とすることにより、メツキ密着性が著
しく改善される為である。 以下に本発明合金を実施例で説明する。 実施例 第1表に示される本発明合金に係る各種成分組
成のインゴツトを高周波溶解炉で大気、不活性又
は還元性雰囲気中で溶解鋳造した。次にこれを
800℃で熱間圧延し、厚さ4mmの板とした。次に
この板を通常の酸洗処理した後、冷間圧延で厚さ
1.0mmとした。さらに750℃にて5分間の焼鈍を施
した後、冷間圧延で厚さ0.4mmの板とした。最後
にこの板を450℃にて1時間熱処理し試料とした。
このようにして調整された試料の評価として、強
度は引張試験、耐熱性は加熱時間30分における軟
化開始温度、導電性(放熱性)は電気伝導率(%
IACS)によつて示した。ハンダ付け性は垂直式
浸漬法で230℃のハンダ浴(すず60−鉛40)に5
秒間浸漬し、ハンダのぬれの状態を目視観察し
た。メツキ密着性は試料に厚さ3μのAgメツキを
施し、450℃にて5分間加熱して表面に発生する
フクレの数を目視観察した。これらの結果を比較
合金とともに第1表に示した。 第1表に示すごとく本発明に係る合金は十分な
導電性とすぐれた耐熱性、強度、ハンダ付け性お
よび耐食性を兼ね具えることが明らかであり、本
発明合金は半導体機器のリード材として最適な合
金である。 【表】
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a copper alloy suitable as a lead material for semiconductor devices such as transistors and integrated circuits (ICs). Conventionally, high nickel alloys such as Kovar alloy and 42 alloy have been preferred as lead materials for semiconductor devices because of their low coefficient of thermal expansion and good adhesion and sealing properties with elements and ceramics. However, in recent years, as the degree of integration of semiconductor circuits has improved, power consumption has increased.
With the increase in the number of ICs, the use of resin as a sealing material, and the use of paste to bond elements and lead frames, the lead materials used are copper-based alloys with good heat dissipation. It has come to be used. However, it has good thermal conductivity as a lead material. Good heat resistance, good solderability and plating adhesion. It is necessary to satisfy a wide range of conditions such as high strength and low cost.
Conventionally used oxygen-free copper, tin-containing copper,
Copper-based alloys such as phosphor bronze and iron-containing copper all have advantages and disadvantages, and are not always satisfactory.
For example, oxygen-free copper has low strength and heat resistance, tin-containing copper and iron-containing copper have unsatisfactory strength, and phosphor bronze has low thermal conductivity and heat resistance. In view of this, Cu-Ni-Si alloys have been offered as copper alloys that have improved the drawbacks of conventional copper-based alloys and have various properties suitable as lead materials for semiconductor devices, but they are not perfect in terms of strength. Therefore, the present invention aims to further improve the Cu-Ni-Si alloy and provide a copper alloy having better properties as a lead material for semiconductor devices. The present invention provides (1) an alloy containing Ni; more than 1.0 to 4.0% by weight, Si; more than 0.3 to 1.0% by weight, and the remainder consisting of copper and unavoidable impurities; As; 0.001 to 0.1% by weight; Sb; 0.001-0.1% by weight, Fe; 0.01-1.0% by weight, Co; 0.01-1.0% by weight, Cr; 0.01-1.0% by weight, Al; 0.01-1.0% by weight, Ti; 0.01-1.0% by weight, Zr; 0.01- 1.0% by weight, Mg; 0.01 to 1.0% by weight, Zn; 0.01 to 1.0% by weight, in total amount of one or more selected from the group consisting of
A copper alloy for lead material of semiconductor devices, characterized by having a composition containing 0.001 to 2.0% by weight. (2) As a subcomponent in an alloy containing Ni: more than 1.0 to 4.0% by weight, Si: more than 0.3 to 1.0% by weight, oxygen content of 10 ppm or less, and the balance consisting of copper and unavoidable impurities, As as a subcomponent. Weight%, Sb; 0.001-0.1% by weight, Fe; 0.01-1.0% by weight, Co; 0.01-1.0% by weight, Cr; 0.01-1.0% by weight, Al; 0.01-1.0% by weight, Ti; 0.01-1.0% by weight. , Zr; 0.01 to 1.0% by weight, Mg; 0.01 to 1.0% by weight, Zn; 0.01 to 1.0% by weight, in total amount of one or more selected from the group consisting of
This is a copper alloy for lead material of semiconductor devices, characterized by having a composition containing 0.001 to 2.0% by weight. The alloy according to the present invention has good heat dissipation, heat resistance, strength, solderability, plating adhesion, etc. required for lead materials. Next, the reason for limiting the alloy components constituting the alloy of the present invention will be explained. By adding Ni together with a predetermined amount of Si, it is effective to increase the strength of the alloy of the present invention and maintain high conductivity. Lead frame materials that require this have insufficient strength. Moreover, if the Ni content exceeds 4.0% by weight, processability and solderability will deteriorate, which is not preferable. Si content exceeds 0.3% by weight and 1.0
The reason why the Si content is 0.3% by weight or less is that even if Ni is co-added, the strength will be insufficient for lead frame materials that require particularly high strength among lead frame materials. If the Si content exceeds 1.0% by weight, processability will rapidly deteriorate and solderability will also decrease, so it is necessary to keep the Si content within the above range of 1.0% by weight as the upper limit. Furthermore, As, Sb, Fe, Co, Or,
If the total amount of one or more selected from the group consisting of Al, Ti, Zr, Mg, and Zn is less than 0.001% by weight, an alloy with high strength and corrosion resistance cannot be obtained;
This is because if the content exceeds % by weight, the conductivity and solderability will be significantly reduced. In addition, the reason why the oxygen content was set to 10 ppm or less is that the oxygen content was
This is because plating adhesion is significantly improved by setting the content to 10 ppm or less. The alloy of the present invention will be explained below using examples. Examples Ingots having various compositions of the alloys of the present invention shown in Table 1 were melted and cast in a high-frequency melting furnace in air, an inert atmosphere, or a reducing atmosphere. then this
It was hot rolled at 800°C to form a plate with a thickness of 4 mm. Next, this plate is subjected to ordinary pickling treatment, and then cold rolled to a thickness of
It was set to 1.0mm. After further annealing at 750°C for 5 minutes, it was cold rolled into a plate with a thickness of 0.4 mm. Finally, this plate was heat treated at 450°C for 1 hour and used as a sample.
The samples prepared in this way were evaluated by tensile test for strength, softening start temperature at 30 minutes heating time for heat resistance, and electrical conductivity (%) for conductivity (heat dissipation).
IACS). Solderability was tested using the vertical dipping method in a soldering bath (tin 60 - lead 40) at 230℃.
The solder was immersed for a second and the wetting state of the solder was visually observed. Plating adhesion was determined by applying Ag plating to a thickness of 3 μm to a sample, heating it at 450° C. for 5 minutes, and visually observing the number of blisters generated on the surface. These results are shown in Table 1 along with comparative alloys. As shown in Table 1, it is clear that the alloy according to the present invention has sufficient electrical conductivity and excellent heat resistance, strength, solderability, and corrosion resistance, and the alloy according to the present invention is ideal as a lead material for semiconductor devices. It is an alloy. 【table】

Claims (1)

【特許請求の範囲】 1 Ni;1.0超〜4.0重量%、 Si;0.3超〜1.0重量%、 Cu及び不可避不純物;残り からなる合金に副成分として As;0.001〜0.1重量%、 Sb;0.001〜0.1重量%、 Fe;0.01〜1.0重量%、 Co;0.01〜1.0重量%、 Cr;0.01〜1.0重量%、 Al;0.01〜1.0重量%、 Ti;0.01〜1.0重量%、 Zr;0.01〜1.0重量%、 Mg;0.01〜1.0重量%、 Zn;0.01〜1.0重量%、 からなる群より選択された1種以上を総量で
0.001〜2.0重量%添加した組成を有することを特
徴とする半導体機器のリード材用銅合金。 2 Ni;1.0超〜4.0重量%、 Si;0.3超〜1.0重量%、 O2;10ppm以下 Cu及び不可避不純物;残り からなる合金に副成分として As;0.001〜0.1重量%、 Sb;0.001〜0.1重量%、 Fe;0.01〜1.0重量%、 Co;0.01〜1.0重量%、 Cr;0.01〜1.0重量%、 Al;0.01〜1.0重量%、 Ti;0.01〜1.0重量%、 Zr;0.01〜1.0重量%、 Mg;0.01〜1.0重量%、 Zn;0.01〜1.0重量%、 からなる群より選択された1種以上を総量で
0.001〜2.0重量%添加した組成を有することを特
徴とする半導体機器のリード材用銅合金。
[Claims] 1 Ni; more than 1.0 to 4.0% by weight; Si; more than 0.3 to 1.0% by weight; Cu and unavoidable impurities; As a subcomponent in an alloy consisting of the remainder; As; 0.001 to 0.1% by weight; Sb; 0.001 to 0.1% by weight, Fe; 0.01-1.0% by weight, Co; 0.01-1.0% by weight, Cr; 0.01-1.0% by weight, Al; 0.01-1.0% by weight, Ti; 0.01-1.0% by weight, Zr; 0.01-1.0% by weight %, Mg: 0.01-1.0% by weight, Zn: 0.01-1.0% by weight, in total amount of one or more selected from the group consisting of
A copper alloy for lead material of semiconductor devices, characterized by having a composition containing 0.001 to 2.0% by weight. 2 Ni: more than 1.0 to 4.0% by weight, Si: more than 0.3 to 1.0% by weight, O 2 : 10ppm or less Cu and unavoidable impurities; as a subcomponent in the alloy consisting of the rest As: 0.001 to 0.1% by weight, Sb: 0.001 to 0.1 Weight%, Fe; 0.01-1.0% by weight, Co; 0.01-1.0% by weight, Cr; 0.01-1.0% by weight, Al; 0.01-1.0% by weight, Ti; 0.01-1.0% by weight, Zr; 0.01-1.0% by weight. , Mg; 0.01 to 1.0% by weight, Zn; 0.01 to 1.0% by weight, in total amount of one or more selected from the group consisting of
A copper alloy for lead material of semiconductor devices, characterized by having a composition containing 0.001 to 2.0% by weight.
JP606182A 1982-01-20 1982-01-20 Copper alloy for lead material of semiconductor device Granted JPS58124254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP606182A JPS58124254A (en) 1982-01-20 1982-01-20 Copper alloy for lead material of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP606182A JPS58124254A (en) 1982-01-20 1982-01-20 Copper alloy for lead material of semiconductor device

Related Child Applications (5)

Application Number Title Priority Date Filing Date
JP23370183A Division JPS59145748A (en) 1983-12-13 1983-12-13 Copper alloy for lead material of semiconductor apparatus
JP23369883A Division JPS59145745A (en) 1983-12-13 1983-12-13 Copper alloy for lead material of semiconductor apparatus
JP23370283A Division JPS59145749A (en) 1983-12-13 1983-12-13 Copper alloy for lead material of semiconductor apparatus
JP23369983A Division JPS59145746A (en) 1983-12-13 1983-12-13 Copper alloy for lead material of semiconductor apparatus
JP23370083A Division JPS59145747A (en) 1983-12-13 1983-12-13 Copper alloy for lead material of semiconductor apparatus

Publications (2)

Publication Number Publication Date
JPS58124254A JPS58124254A (en) 1983-07-23
JPS6314056B2 true JPS6314056B2 (en) 1988-03-29

Family

ID=11628069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP606182A Granted JPS58124254A (en) 1982-01-20 1982-01-20 Copper alloy for lead material of semiconductor device

Country Status (1)

Country Link
JP (1) JPS58124254A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100145A (en) * 2005-09-30 2007-04-19 Dowa Holdings Co Ltd Copper-alloy sheet material with improved bendability and fatigue characteristic

Families Citing this family (13)

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Publication number Priority date Publication date Assignee Title
JPS5949293B2 (en) * 1982-06-05 1984-12-01 株式会社神戸製鋼所 Copper alloy for electrical and electronic parts and its manufacturing method
JPS59136439A (en) * 1983-01-26 1984-08-06 Sanpo Shindo Kogyo Kk Copper base alloy
JPS6043448A (en) * 1983-08-16 1985-03-08 Kobe Steel Ltd Copper alloy for terminal or connector and its manufacture
JPS60218440A (en) * 1984-04-13 1985-11-01 Furukawa Electric Co Ltd:The Copper alloy for lead frame
JPS60218442A (en) * 1984-04-13 1985-11-01 Furukawa Electric Co Ltd:The Copper alloy for lead frame
JPS61177348A (en) * 1985-02-01 1986-08-09 Kobe Steel Ltd Lead material for ceramic packaged ic
US4650123A (en) * 1986-03-25 1987-03-17 Toyota Jidosha Kabushiki Kaisha Rotary type electrostatic spray painting device
US4700896A (en) * 1986-04-11 1987-10-20 Toyota Jidosha Kabushiki Kaisha Rotary type electrostatic spray painting device
KR940010455B1 (en) * 1992-09-24 1994-10-22 김영길 Copper alloy and making method thereof
KR0157257B1 (en) * 1995-12-08 1998-11-16 정훈보 Method for manufacturing cu alloy and the same product
JP4542008B2 (en) * 2005-06-07 2010-09-08 株式会社神戸製鋼所 Display device
JP5121299B2 (en) * 2007-05-09 2013-01-16 アルティアム サービシズ リミテッド エルエルシー Liquid crystal display
US7782413B2 (en) 2007-05-09 2010-08-24 Tohoku University Liquid crystal display device and manufacturing method therefor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314612A (en) * 1976-07-28 1978-02-09 Toshiba Corp Lead wire
US4191601A (en) * 1979-02-12 1980-03-04 Ampco-Pittsburgh Corporation Copper-nickel-silicon-chromium alloy having improved electrical conductivity
JPS55104449A (en) * 1979-02-02 1980-08-09 Hitachi Ltd High-strength high-electrically-conductive copper alloy with superior weldability
JPS55158246A (en) * 1979-04-30 1980-12-09 Delta Enfield Metals Precipitation hardenable copper alloy
JPS56142840A (en) * 1980-04-04 1981-11-07 Hitachi Ltd Copper alloy having minute crystal grain
JPS572851A (en) * 1980-06-06 1982-01-08 Nippon Mining Co Ltd Copper alloy for lead material of semiconductor device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314612A (en) * 1976-07-28 1978-02-09 Toshiba Corp Lead wire
JPS55104449A (en) * 1979-02-02 1980-08-09 Hitachi Ltd High-strength high-electrically-conductive copper alloy with superior weldability
US4191601A (en) * 1979-02-12 1980-03-04 Ampco-Pittsburgh Corporation Copper-nickel-silicon-chromium alloy having improved electrical conductivity
JPS55158246A (en) * 1979-04-30 1980-12-09 Delta Enfield Metals Precipitation hardenable copper alloy
JPS56142840A (en) * 1980-04-04 1981-11-07 Hitachi Ltd Copper alloy having minute crystal grain
JPS572851A (en) * 1980-06-06 1982-01-08 Nippon Mining Co Ltd Copper alloy for lead material of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100145A (en) * 2005-09-30 2007-04-19 Dowa Holdings Co Ltd Copper-alloy sheet material with improved bendability and fatigue characteristic

Also Published As

Publication number Publication date
JPS58124254A (en) 1983-07-23

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