JPS60218440A - Copper alloy for lead frame - Google Patents
Copper alloy for lead frameInfo
- Publication number
- JPS60218440A JPS60218440A JP7398684A JP7398684A JPS60218440A JP S60218440 A JPS60218440 A JP S60218440A JP 7398684 A JP7398684 A JP 7398684A JP 7398684 A JP7398684 A JP 7398684A JP S60218440 A JPS60218440 A JP S60218440A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- lead frame
- copper alloy
- added
- electrical conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Conductive Materials (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は強度が高く、導電率、耐熱性にすぐれ、しかも
銅合金としての加工性にすぐれ、しかもリードフレーム
材に必要欠くべからざる性質であるメッキ性(半田付性
)にすぐれたリードフレーム用銅合金に関するものであ
る。Detailed Description of the Invention The present invention has high strength, excellent conductivity and heat resistance, and has excellent workability as a copper alloy. ) This relates to a copper alloy for lead frames with excellent properties.
近年半導体集積回路は集積度の増大、小型化が進むと同
時に高信頼性がめられている。BACKGROUND ART In recent years, semiconductor integrated circuits have become more highly integrated and smaller, and at the same time are required to have high reliability.
また半導体集積回路の形態も従来のDIP型ICからチ
ップキャリアー型、PGA型等へと変化しつつある。こ
のため、これら集積回路のリードフレームに使われる材
料は、薄肉化するとともに小型化しておシ、同時に材料
にめられる特性は優れた特性が要求され、従来上として
使われていたFe−Ni系材料である112合金をうわ
まわることが急務となった。すなわちその特性の第1は
材料の薄肉化に対して、その構成部品の強度を低下を防
ぐだめの栃料強度の向上である。第2の特性は集積度の
増大によシ生じる熱放散性の向上、すなわら、熱伝導と
同一特性である電気伝導率の向上である。また、第5の
特性は、耐熱性であり、第4の特性は半導体をフレJム
上に固定する時及び半導体からリードフレームの足の部
分への配線妬使う金線のボンディングを行う前処理とし
て、リードフレーム表面へのメッキ処理時のメッキ密着
性である。Furthermore, the form of semiconductor integrated circuits is also changing from the conventional DIP type IC to chip carrier type, PGA type, etc. For this reason, the materials used for the lead frames of these integrated circuits have become thinner and smaller, and at the same time, the materials are required to have excellent properties, and the Fe-Ni There was an urgent need to improve the material, 112 alloy. That is, the first characteristic is an improvement in the strength of the material, which prevents the strength of its constituent parts from decreasing as the material becomes thinner. The second property is an improvement in heat dissipation caused by an increase in the degree of integration, that is, an improvement in electrical conductivity, which is the same property as thermal conduction. The fifth characteristic is heat resistance, and the fourth characteristic is pretreatment for bonding the gold wire used when fixing the semiconductor on the frame and for wiring from the semiconductor to the leg part of the lead frame. is the adhesion of plating to the surface of the lead frame during plating treatment.
以上の特性が材料にめられる性質である。現在、主とし
て使用されている42合金は電気伝導率が約5%lAC
3と低く、熱放散からみると大きな欠点となっており、
その改良が望まれている。The above characteristics are the properties found in the material. Currently, the 42 alloy mainly used has an electrical conductivity of approximately 5% lAC.
3, which is a major drawback in terms of heat dissipation.
Improvements are desired.
しかし、これを銅合金で代替すると電気導伝率は前述の
3%から50〜70%lAC3へと飛躍的に向上するが
、112合金の持っている強度50〜70Kg/−を満
足することは一部のCu合金を焼入−焼戻しの熱処理を
ほどこしてやっと達成可能な特性であった。However, if this is replaced with a copper alloy, the electrical conductivity will dramatically improve from the aforementioned 3% to 50-70% lAC3, but it will not be able to satisfy the strength of 112 alloy, which is 50-70 kg/-. This characteristic could only be achieved by subjecting some Cu alloys to a heat treatment of quenching and tempering.
本発明はこれら状況を鑑み、各種実験検討を重ねた結果
、製造コストの高い「焼入−焼戻し」の処理を行なわず
、材料を製造し、かつ、l12合金と同程度の強度を有
し、しかも、電気導電率の良好ナリードフレーム用銅合
金を開発したものであシ、Tiを005〜2..0wt
%(以下チと略記)含有し、これに更に第う元素として
SbXAg、 Te、 Si、 Or、 Go。In view of these circumstances, as a result of various experimental studies, the present invention has been developed to produce a material that does not require the expensive "quenching-tempering" process, and has a strength comparable to that of l12 alloy. In addition, we have developed a copper alloy for use in lead frames that has good electrical conductivity, and has a Ti content of 005 to 2. .. 0wt
% (hereinafter abbreviated as ``chi''), and further contains SbXAg, Te, Si, Or, and Go as tertiary elements.
FeXP、 Sn、 Mg、 Zr、Ail、 Mn、
Be、 Niの内の1種又は2種以上を合剖で3チ以
下添加し残部cuからなることを特徴とする。FeXP, Sn, Mg, Zr, Ail, Mn,
It is characterized in that one or more of Be and Ni is added in an amount of 3 or less by autopsy, and the remainder consists of cu.
Cu IICTiを添加すると、0u−Tiの化合物を
作シ(Eu中に析出する。これら析出は一般に行なわれ
る高温での溶体化、焼入その後の時効処理によって強度
向上をはかると同時に電気導電率が溶体化処理したとき
TiがCu中に固溶して一時低下したものが回復して、
強度、導電率を兼ね備えた特性が得られるが、本発明で
は、溶体化処理−焼入一時効処理を行なわず一般にCu
合金を製造する工程すなわち熱間加工後冷間加工と焼鈍
を繰返して最終製品を得る方法にて特性を確保するもの
である。本発明合金を熱間加工した後、焼鈍を500℃
〜700℃で1時間行うとCu中に固溶していたTiが
Cu−Ti又はCu−Ti−X、 Ti−X (Xは本
発明合金の第三元素)の形で析出する。これら析出物に
よる強化作用は焼入一時効処理に比して、いくぶん弱い
が、Cu−Tiの焼入一時効処理における強化作用より
は0u−Ti−X 、、Ti−Xの析出物が生じている
ので補うことが可能であるのみならず、それをうわまわ
る作用を持つことをみいだした。When Cu IICTi is added, a 0u-Ti compound is formed (precipitated in Eu). These precipitations are generally performed by solution treatment at high temperatures and aging treatment after quenching to improve strength and at the same time increase electrical conductivity. During solution treatment, Ti dissolved in Cu and the temporary decrease recovered.
Although properties having both strength and electrical conductivity can be obtained, in the present invention, Cu is generally treated without solution treatment and temporary quenching treatment.
The properties are ensured through the process of manufacturing the alloy, that is, by repeating hot working, cold working, and annealing to obtain the final product. After hot working the alloy of the present invention, annealing is performed at 500°C.
When carried out at ~700°C for 1 hour, Ti dissolved in Cu precipitates in the form of Cu-Ti, Cu-Ti-X, or Ti-X (X is the third element of the alloy of the present invention). Although the strengthening effect caused by these precipitates is somewhat weaker than that in temporary hardening treatment, the strengthening effect of 0u-Ti-X, Ti-X precipitates is stronger than that in temporary hardening treatment of Cu-Ti. We have discovered that it is not only possible to compensate for this, but also to have an effect that outweighs it.
また、電気導電率はGu−Tiの場合、Cuに対するT
1の固溶度が比較的大きいため、Cu−Tiが完全に析
出しても電気導電率はTi 2.0 %で、30%lA
C3であるが、本発明の第三添加元素を加えることによ
り、Gu−Ti−X 、 Ti−Xの析出を生じて、電
気導電率の向上が著しくはかれる。In addition, in the case of Gu-Ti, the electrical conductivity is T with respect to Cu.
Since the solid solubility of 1 is relatively large, even if Cu-Ti is completely precipitated, the electrical conductivity is 2.0% Ti and 30% lA.
By adding the third additive element of the present invention to C3, Gu-Ti-X and Ti-X are precipitated, and the electrical conductivity is significantly improved.
次に耐熱性はリードフレーム材に要求される重要な特性
の1つである。リードフレーム材の耐熱性は一般にl1
00℃〜500℃で充分である。これは(3u IIC
Tiが添加されればすでにこの値はクリアー出来る。し
かし、本発明のT1添加が07〜20チの範囲になると
0u−Ti合金の耐熱性は650℃以上となり本合金を
製造する場合の焼鈍温度が上昇してエネルギー効率が悪
化する。そごで第三元素としてX (= Sb、 Ag
、 Te等)を添加することによシ焼鈍温度を500〜
650℃に下げることが可能となるとともにリードフレ
ーム材としての4熱性も充分に確保出来る。Next, heat resistance is one of the important properties required of lead frame materials. The heat resistance of lead frame material is generally l1
00°C to 500°C is sufficient. This is (3u IIC
This value can already be cleared if Ti is added. However, when the T1 addition of the present invention falls within the range of 07 to 20 inches, the heat resistance of the 0u-Ti alloy becomes 650° C. or higher, which increases the annealing temperature when producing this alloy and deteriorates energy efficiency. As the third element, X (= Sb, Ag
, Te, etc.) to increase the annealing temperature to 500~
It is possible to lower the temperature to 650°C, and it is also possible to sufficiently secure four-thermal properties as a lead frame material.
また、リードフレーム材に必要なメッキ密着性(半田付
性)は銅合金母材にAg、 Sn、 5n−Pb (半
田)をメッキ又はディップ法により塗布後、100〜2
00℃で長期間保持した場合にメッキ元素と母材との間
でわずかの相互拡散層を形成したときが密着性は良好で
あるが、更に拡散が進むと、母材中の元素がメッキ表面
まで拡散して、集積回路部品製造のとき半導体とリード
フレーム部を結線するAu線のボンディング性を悪化さ
せる。又一方では相互拡散層が厚くなシ、同時にこの層
に0u−Ti系合金ではCu中罠固溶しているT1が拡
散して、メッキや半田中のSn、Agと脆い化合物を作
シメッキ層剥離の原因となる。これを防ぐにはCu−T
i母材中に固溶しているT1を出来るだけ析出物にして
固定化すれば、T1の拡散が減少、剥離性が減少する。In addition, the plating adhesion (solderability) required for lead frame materials is 100~2 after applying Ag, Sn, 5n-Pb (solder) to the copper alloy base material by plating or dipping.
Adhesion is good when a slight interdiffusion layer is formed between the plating element and the base material when kept at 00°C for a long period of time, but if the diffusion progresses further, the elements in the base material will spread to the plating surface. This leads to a deterioration in the bonding properties of the Au wire that connects the semiconductor and the lead frame during the manufacture of integrated circuit components. On the other hand, the interdiffusion layer is thick, and at the same time, T1, which is a solid solution in Cu in 0u-Ti alloys, diffuses into this layer, forming brittle compounds with Sn and Ag in the plating and soldering. This may cause peeling. To prevent this, Cu-T
i If the solid solution of T1 in the base material is made into precipitates and fixed as much as possible, the diffusion of T1 will be reduced and the releasability will be reduced.
本発明合金ではCu−Tiのみでは、T1がかなり固溶
するが、第5元素であるSb、 Ag、 Te、 Si
、Or。In the alloy of the present invention, if only Cu-Ti is used, T1 is considerably dissolved in solid solution, but the fifth element Sb, Ag, Te, Si
, Or.
C01Fe%Ps ”0% Mgz Zr %’ jV
!−、Mn、 Be、 Nlを添加することによりT1
と化合物を作り固定化、拡散層脆化をおこすT1の影響
を少くすることが可能になったものである。C01Fe%Ps "0% Mgz Zr %' jV
! -, Mn, Be, Nl by adding T1
This makes it possible to create a compound with and fix it, thereby reducing the influence of T1, which causes diffusion layer embrittlement.
しかして本発明合金の組成を上記のように限定したのは
T1が005チ未満では効果がなく20チを越えると鋳
造性、加工性が悪く製造困難となるからであり、第5元
素が30%を越えるとやはり製造困難となるためである
。However, the reason why the composition of the alloy of the present invention is limited as mentioned above is that if T1 is less than 0.05 mm, it is ineffective, and if T1 exceeds 20 mm, castability and workability are poor, making it difficult to manufacture. This is because if it exceeds %, it becomes difficult to manufacture.
以下本発明を実施例を用いて詳細に説明する。The present invention will be described in detail below using examples.
黒鉛ルツボを使用して銅を溶解し、その湯面を木炭粉末
にて覆い、充分に溶解した後、Tiを添加、更に上記各
種の第う元素を添加して第16す組成の巾150 mm
、長さ200聴、厚さ25閣の鋳塊を得だ。次に鋳塊表
面を1面あたり2.5 mm面削した後、熱間圧延を行
って、厚さ8mm、巾150胴の板を作った。しかる後
、焼鈍と圧延をくり返して最終厚さ025胴の板材を得
た。なお中間焼鈍後の仕上加工率は40%であった。Copper was melted using a graphite crucible, the surface of the hot water was covered with charcoal powder, and after sufficient melting, Ti was added, and the various elements mentioned above were added to make a width of 150 mm.
The ingot was 200 mm long and 25 mm thick. Next, the surface of the ingot was milled by 2.5 mm per surface, and then hot rolled to produce a plate with a thickness of 8 mm and a width of 150 mm. Thereafter, annealing and rolling were repeated to obtain a plate having a final thickness of 025 mm. Note that the finishing rate after intermediate annealing was 40%.
このようにして得た供試材をもとに、導電率、引張シ強
さ、耐熱性、及びメッキ密着性を測定した。これらの結
果を第1表に示した。Based on the sample material thus obtained, electrical conductivity, tensile strength, heat resistance, and plating adhesion were measured. These results are shown in Table 1.
第1表
第1表から明らかな如く本発明合金は従来のL2合金と
比較して強度メッキ密着性は同等で、しかも電気導電率
においては格段にすぐれたリードフレーム用銅合金であ
ることがわかる。As is clear from Table 1, the alloy of the present invention is a copper alloy for lead frames that has the same strength and plating adhesion as the conventional L2 alloy, and has significantly superior electrical conductivity. .
これに対し、第3元素を添加していない比較合金Nα2
0、Tiが少く第5元素も添加していない比較合金醜2
1はメッキ密着性あるい、は強度に劣ることがわかる。On the other hand, comparative alloy Nα2 with no third element added
0. Comparative alloy Ugly 2 with less Ti and no fifth element added
It can be seen that No. 1 is inferior in plating adhesion or strength.
以上述べたように本発明合金は、導電率、引張シ強さ、
メッキ密着性、耐熱性に優れたリードフレーム用銅合金
であシ、電子工業上顕著な効果を奏するものである。As mentioned above, the alloy of the present invention has good electrical conductivity, tensile strength,
This copper alloy for lead frames has excellent plating adhesion and heat resistance, and has remarkable effects in the electronics industry.
Claims (1)
としてSbXAg、 Te、 Si、Or、 co、F
e、 P、 Sn、 Mg、 Zr、 U。 Mn 、 Be 、’ Niの内の1種又は2種以上を
合計で′54Pwt%以下を添加し、残部がCuからさ
ることを特徴とするリードフレーム用銅合金。[Claims] T1 is 005 to 2. Contains Owt% and further contains SbXAg, Te, Si, Or, co, F as a fifth element.
e, P, Sn, Mg, Zr, U. A copper alloy for lead frames, characterized in that one or more of Mn, Be, and 'Ni are added in a total amount of 54 Pwt% or less, and the balance is Cu.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7398684A JPS60218440A (en) | 1984-04-13 | 1984-04-13 | Copper alloy for lead frame |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7398684A JPS60218440A (en) | 1984-04-13 | 1984-04-13 | Copper alloy for lead frame |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60218440A true JPS60218440A (en) | 1985-11-01 |
Family
ID=13533937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7398684A Pending JPS60218440A (en) | 1984-04-13 | 1984-04-13 | Copper alloy for lead frame |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60218440A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183427A (en) * | 1985-02-08 | 1986-08-16 | Mitsui Mining & Smelting Co Ltd | High strength copper alloy |
JPS61242052A (en) * | 1985-04-19 | 1986-10-28 | Mitsubishi Shindo Kk | Copper alloy lead material for semiconductor device |
JPS622559A (en) * | 1985-06-28 | 1987-01-08 | Toshiba Corp | Lead frame |
JPS6250428A (en) * | 1985-08-29 | 1987-03-05 | Furukawa Electric Co Ltd:The | Copper alloy for electronic appliance |
JPS62130247A (en) * | 1985-11-29 | 1987-06-12 | Furukawa Electric Co Ltd:The | Copper alloy for electronic appliance |
JPS62211337A (en) * | 1985-04-02 | 1987-09-17 | ヴイ−ラント ウエルケ アクチ−エンゲゼルシヤフト | Copper, titanium and cobalt alloy as material for electronics parts |
JPS62278243A (en) * | 1986-05-27 | 1987-12-03 | Dowa Mining Co Ltd | Copper alloy for lead frame and its production |
JPS63317635A (en) * | 1988-05-19 | 1988-12-26 | Furukawa Electric Co Ltd:The | Copper alloy for electronic equipment and its production |
JPH0285330A (en) * | 1988-09-20 | 1990-03-26 | Mitsui Mining & Smelting Co Ltd | Copper alloy having good press bendability and its manufacture |
JP2002069550A (en) * | 2000-09-04 | 2002-03-08 | Furuya Kinzoku:Kk | Metallic material, sputtering target material for thin film deposition and thin film |
JP2002075101A (en) * | 2000-09-04 | 2002-03-15 | Furuya Kinzoku:Kk | Wiring, electrode, and contact point |
US6749699B2 (en) | 2000-08-09 | 2004-06-15 | Olin Corporation | Silver containing copper alloy |
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JPS5539612A (en) * | 1978-09-12 | 1980-03-19 | Fujitsu Ltd | Semiconductor laser device |
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JPS6039139A (en) * | 1983-08-12 | 1985-02-28 | Mitsui Mining & Smelting Co Ltd | Softening resistant copper alloy with high conductivity |
JPS60114556A (en) * | 1983-11-24 | 1985-06-21 | Mitsui Mining & Smelting Co Ltd | Production of copper-base alloy |
JPS60181250A (en) * | 1984-02-28 | 1985-09-14 | Mitsubishi Metal Corp | Copper alloy for material of lead for semiconductor apparatus |
JPS60184655A (en) * | 1984-03-02 | 1985-09-20 | Hitachi Metals Ltd | High-strength copper alloy having high electric conductivity |
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JPS549117A (en) * | 1977-06-24 | 1979-01-23 | Toshiba Corp | High strength copper alloy |
JPS5539612A (en) * | 1978-09-12 | 1980-03-19 | Fujitsu Ltd | Semiconductor laser device |
JPS5836058A (en) * | 1981-08-27 | 1983-03-02 | Canon Inc | Acoustic coupler |
JPS58124254A (en) * | 1982-01-20 | 1983-07-23 | Nippon Mining Co Ltd | Copper alloy for lead material of semiconductor device |
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JPS59145749A (en) * | 1983-12-13 | 1984-08-21 | Nippon Mining Co Ltd | Copper alloy for lead material of semiconductor apparatus |
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JPS60184655A (en) * | 1984-03-02 | 1985-09-20 | Hitachi Metals Ltd | High-strength copper alloy having high electric conductivity |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183427A (en) * | 1985-02-08 | 1986-08-16 | Mitsui Mining & Smelting Co Ltd | High strength copper alloy |
JPH0356292B2 (en) * | 1985-02-08 | 1991-08-27 | ||
JPS62211337A (en) * | 1985-04-02 | 1987-09-17 | ヴイ−ラント ウエルケ アクチ−エンゲゼルシヤフト | Copper, titanium and cobalt alloy as material for electronics parts |
JPH0380856B2 (en) * | 1985-04-19 | 1991-12-26 | Mitsubishi Shindo Kk | |
JPS61242052A (en) * | 1985-04-19 | 1986-10-28 | Mitsubishi Shindo Kk | Copper alloy lead material for semiconductor device |
JPS622559A (en) * | 1985-06-28 | 1987-01-08 | Toshiba Corp | Lead frame |
JPS6250428A (en) * | 1985-08-29 | 1987-03-05 | Furukawa Electric Co Ltd:The | Copper alloy for electronic appliance |
JPS62130247A (en) * | 1985-11-29 | 1987-06-12 | Furukawa Electric Co Ltd:The | Copper alloy for electronic appliance |
JPS62278243A (en) * | 1986-05-27 | 1987-12-03 | Dowa Mining Co Ltd | Copper alloy for lead frame and its production |
JPS63317635A (en) * | 1988-05-19 | 1988-12-26 | Furukawa Electric Co Ltd:The | Copper alloy for electronic equipment and its production |
JPH0285330A (en) * | 1988-09-20 | 1990-03-26 | Mitsui Mining & Smelting Co Ltd | Copper alloy having good press bendability and its manufacture |
JPH0469217B2 (en) * | 1988-09-20 | 1992-11-05 | Mitsui Mining & Smelting Co | |
US6749699B2 (en) | 2000-08-09 | 2004-06-15 | Olin Corporation | Silver containing copper alloy |
JP2002069550A (en) * | 2000-09-04 | 2002-03-08 | Furuya Kinzoku:Kk | Metallic material, sputtering target material for thin film deposition and thin film |
JP2002075101A (en) * | 2000-09-04 | 2002-03-15 | Furuya Kinzoku:Kk | Wiring, electrode, and contact point |
JP4494610B2 (en) * | 2000-09-04 | 2010-06-30 | 株式会社フルヤ金属 | Sputtering target material for thin film formation |
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