JPS6310827B2 - - Google Patents

Info

Publication number
JPS6310827B2
JPS6310827B2 JP54128643A JP12864379A JPS6310827B2 JP S6310827 B2 JPS6310827 B2 JP S6310827B2 JP 54128643 A JP54128643 A JP 54128643A JP 12864379 A JP12864379 A JP 12864379A JP S6310827 B2 JPS6310827 B2 JP S6310827B2
Authority
JP
Japan
Prior art keywords
vacuum
plate
vacuum chamber
suction
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54128643A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5632144A (en
Inventor
Satoshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP12864379A priority Critical patent/JPS5632144A/ja
Publication of JPS5632144A publication Critical patent/JPS5632144A/ja
Publication of JPS6310827B2 publication Critical patent/JPS6310827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP12864379A 1979-10-05 1979-10-05 Vacuum contact printing device Granted JPS5632144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12864379A JPS5632144A (en) 1979-10-05 1979-10-05 Vacuum contact printing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12864379A JPS5632144A (en) 1979-10-05 1979-10-05 Vacuum contact printing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10795779A Division JPS5632133A (en) 1979-08-24 1979-08-24 Vacuum contact printing method

Publications (2)

Publication Number Publication Date
JPS5632144A JPS5632144A (en) 1981-04-01
JPS6310827B2 true JPS6310827B2 (enExample) 1988-03-09

Family

ID=14989885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12864379A Granted JPS5632144A (en) 1979-10-05 1979-10-05 Vacuum contact printing device

Country Status (1)

Country Link
JP (1) JPS5632144A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59188917A (ja) * 1983-04-11 1984-10-26 Doujiyun Koki Kk 真空焼枠装置とこの装置を用いた真空焼付法
JPS63271255A (ja) * 1987-04-28 1988-11-09 Somar Corp マスキングフイルム原版を用いる感光性樹脂の露光方法

Also Published As

Publication number Publication date
JPS5632144A (en) 1981-04-01

Similar Documents

Publication Publication Date Title
JPS6057216B2 (ja) ジグ
JPH10233430A (ja) 粘着テープ貼付け装置
JPS6310826B2 (enExample)
JPS6310827B2 (enExample)
JP3330997B2 (ja) 回路基板形成用露光装置
JPH01200346A (ja) 写真用材料整合装置及び方法
JPS5632133A (en) Vacuum contact printing method
JP3285158B2 (ja) 真空密着焼付装置
JPH049297B2 (enExample)
JP2002091011A (ja) 密着露光装置
JP2928848B2 (ja) 真空密着焼付装置
JP2568775Y2 (ja) 真空密着式焼付装置
JP2834833B2 (ja) 真空密着焼付装置
JP7272640B2 (ja) ワーク装着装置及びワーク貼合システム
KR100194403B1 (ko) 진공밀착인화장치,인화대 및 인화방법
JP2951732B2 (ja) 焼付装置における原版真空吸着取り付け装置
JPH0743714Y2 (ja) 真空密着式焼付装置
JPS63115155A (ja) 真空密着焼付機の密着方法
JPH0336538A (ja) フィルム密着方法とフィルム密着装置
JPS59188917A (ja) 真空焼枠装置とこの装置を用いた真空焼付法
JPS60189746A (ja) 露光装置
JP3554179B2 (ja) 金属薄板の両面焼付け装置
JPS6114046Y2 (enExample)
JP3331778B2 (ja) 露光機
JPS62229832A (ja) ２平板分離装置