JPS5632144A - Vacuum contact printing device - Google Patents
Vacuum contact printing deviceInfo
- Publication number
- JPS5632144A JPS5632144A JP12864379A JP12864379A JPS5632144A JP S5632144 A JPS5632144 A JP S5632144A JP 12864379 A JP12864379 A JP 12864379A JP 12864379 A JP12864379 A JP 12864379A JP S5632144 A JPS5632144 A JP S5632144A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- vacuum
- transmittable
- vacuum chambers
- cover member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12864379A JPS5632144A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12864379A JPS5632144A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10795779A Division JPS5632133A (en) | 1979-08-24 | 1979-08-24 | Vacuum contact printing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5632144A true JPS5632144A (en) | 1981-04-01 |
JPS6310827B2 JPS6310827B2 (ja) | 1988-03-09 |
Family
ID=14989885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12864379A Granted JPS5632144A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5632144A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188917A (ja) * | 1983-04-11 | 1984-10-26 | Doujiyun Koki Kk | 真空焼枠装置とこの装置を用いた真空焼付法 |
JPS63271255A (ja) * | 1987-04-28 | 1988-11-09 | Somar Corp | マスキングフイルム原版を用いる感光性樹脂の露光方法 |
-
1979
- 1979-10-05 JP JP12864379A patent/JPS5632144A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59188917A (ja) * | 1983-04-11 | 1984-10-26 | Doujiyun Koki Kk | 真空焼枠装置とこの装置を用いた真空焼付法 |
JPS63271255A (ja) * | 1987-04-28 | 1988-11-09 | Somar Corp | マスキングフイルム原版を用いる感光性樹脂の露光方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6310827B2 (ja) | 1988-03-09 |
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