JPS6284544A - 容量の製造方法 - Google Patents

容量の製造方法

Info

Publication number
JPS6284544A
JPS6284544A JP60225260A JP22526085A JPS6284544A JP S6284544 A JPS6284544 A JP S6284544A JP 60225260 A JP60225260 A JP 60225260A JP 22526085 A JP22526085 A JP 22526085A JP S6284544 A JPS6284544 A JP S6284544A
Authority
JP
Japan
Prior art keywords
layer
silicon nitride
silicon
capacitor
nitride layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60225260A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0584672B2 (enrdf_load_stackoverflow
Inventor
Masanobu Yoshiie
善家　昌伸
Yasuaki Hokari
穂苅　泰明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60225260A priority Critical patent/JPS6284544A/ja
Publication of JPS6284544A publication Critical patent/JPS6284544A/ja
Publication of JPH0584672B2 publication Critical patent/JPH0584672B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP60225260A 1985-10-08 1985-10-08 容量の製造方法 Granted JPS6284544A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60225260A JPS6284544A (ja) 1985-10-08 1985-10-08 容量の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60225260A JPS6284544A (ja) 1985-10-08 1985-10-08 容量の製造方法

Publications (2)

Publication Number Publication Date
JPS6284544A true JPS6284544A (ja) 1987-04-18
JPH0584672B2 JPH0584672B2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=16826524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60225260A Granted JPS6284544A (ja) 1985-10-08 1985-10-08 容量の製造方法

Country Status (1)

Country Link
JP (1) JPS6284544A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112360A (ja) * 1981-12-25 1983-07-04 Nec Corp 半導体装置用キヤパシタおよびその製造方法
JPS58180014A (ja) * 1982-04-16 1983-10-21 富士通株式会社 薄膜形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112360A (ja) * 1981-12-25 1983-07-04 Nec Corp 半導体装置用キヤパシタおよびその製造方法
JPS58180014A (ja) * 1982-04-16 1983-10-21 富士通株式会社 薄膜形成方法

Also Published As

Publication number Publication date
JPH0584672B2 (enrdf_load_stackoverflow) 1993-12-02

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