JPS627669A - 半導体製造用部材 - Google Patents
半導体製造用部材Info
- Publication number
- JPS627669A JPS627669A JP60142496A JP14249685A JPS627669A JP S627669 A JPS627669 A JP S627669A JP 60142496 A JP60142496 A JP 60142496A JP 14249685 A JP14249685 A JP 14249685A JP S627669 A JPS627669 A JP S627669A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- parts
- sic
- oxygen
- strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 238000010304 firing Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 32
- 229910010271 silicon carbide Inorganic materials 0.000 description 32
- 238000005245 sintering Methods 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 12
- 239000002245 particle Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 239000012300 argon atmosphere Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 238000004901 spalling Methods 0.000 description 2
- 239000011882 ultra-fine particle Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60142496A JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60142496A JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627669A true JPS627669A (ja) | 1987-01-14 |
| JPH0583513B2 JPH0583513B2 (enrdf_load_stackoverflow) | 1993-11-26 |
Family
ID=15316680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60142496A Granted JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627669A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257218A (ja) * | 1987-03-30 | 1988-10-25 | ノートン カンパニー | 拡散炉構成要素 |
| JPH01119560A (ja) * | 1987-10-31 | 1989-05-11 | Toshiba Ceramics Co Ltd | 導電性炭化ケイ素焼結体 |
| JPH01131059A (ja) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | 炭化珪素質炉芯管の製造方法 |
| JP2012180230A (ja) * | 2011-02-28 | 2012-09-20 | Tokyo Yogyo Co Ltd | 導電性セラミックス焼結体 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS553396A (en) * | 1978-06-15 | 1980-01-11 | Carborundum Co | Silicon carbideealuminum nitride sintered product and its manugacture |
| JPS57148344A (en) * | 1981-03-10 | 1982-09-13 | Nec Corp | Manufacturing equipment for semiconductor |
| JPS5950086A (ja) * | 1982-09-17 | 1984-03-22 | 南九州化学工業株式会社 | 被覆粒状カリ肥料 |
-
1985
- 1985-07-01 JP JP60142496A patent/JPS627669A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS553396A (en) * | 1978-06-15 | 1980-01-11 | Carborundum Co | Silicon carbideealuminum nitride sintered product and its manugacture |
| JPS57148344A (en) * | 1981-03-10 | 1982-09-13 | Nec Corp | Manufacturing equipment for semiconductor |
| JPS5950086A (ja) * | 1982-09-17 | 1984-03-22 | 南九州化学工業株式会社 | 被覆粒状カリ肥料 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257218A (ja) * | 1987-03-30 | 1988-10-25 | ノートン カンパニー | 拡散炉構成要素 |
| JPH01119560A (ja) * | 1987-10-31 | 1989-05-11 | Toshiba Ceramics Co Ltd | 導電性炭化ケイ素焼結体 |
| JPH01131059A (ja) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | 炭化珪素質炉芯管の製造方法 |
| JP2012180230A (ja) * | 2011-02-28 | 2012-09-20 | Tokyo Yogyo Co Ltd | 導電性セラミックス焼結体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0583513B2 (enrdf_load_stackoverflow) | 1993-11-26 |
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