JPH0583513B2 - - Google Patents
Info
- Publication number
- JPH0583513B2 JPH0583513B2 JP60142496A JP14249685A JPH0583513B2 JP H0583513 B2 JPH0583513 B2 JP H0583513B2 JP 60142496 A JP60142496 A JP 60142496A JP 14249685 A JP14249685 A JP 14249685A JP H0583513 B2 JPH0583513 B2 JP H0583513B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- sic
- parts
- aln
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60142496A JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60142496A JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627669A JPS627669A (ja) | 1987-01-14 |
| JPH0583513B2 true JPH0583513B2 (enrdf_load_stackoverflow) | 1993-11-26 |
Family
ID=15316680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60142496A Granted JPS627669A (ja) | 1985-07-01 | 1985-07-01 | 半導体製造用部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627669A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4761134B1 (en) * | 1987-03-30 | 1993-11-16 | Silicon carbide diffusion furnace components with an impervious coating thereon | |
| JPH01119560A (ja) * | 1987-10-31 | 1989-05-11 | Toshiba Ceramics Co Ltd | 導電性炭化ケイ素焼結体 |
| JPH01131059A (ja) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | 炭化珪素質炉芯管の製造方法 |
| JP5281666B2 (ja) * | 2011-02-28 | 2013-09-04 | 東京窯業株式会社 | 導電性セラミックス焼結体 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS553396A (en) * | 1978-06-15 | 1980-01-11 | Carborundum Co | Silicon carbideealuminum nitride sintered product and its manugacture |
| JPS57148344A (en) * | 1981-03-10 | 1982-09-13 | Nec Corp | Manufacturing equipment for semiconductor |
| JPS5950086A (ja) * | 1982-09-17 | 1984-03-22 | 南九州化学工業株式会社 | 被覆粒状カリ肥料 |
-
1985
- 1985-07-01 JP JP60142496A patent/JPS627669A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627669A (ja) | 1987-01-14 |
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