JPS6267839A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6267839A
JPS6267839A JP20934685A JP20934685A JPS6267839A JP S6267839 A JPS6267839 A JP S6267839A JP 20934685 A JP20934685 A JP 20934685A JP 20934685 A JP20934685 A JP 20934685A JP S6267839 A JPS6267839 A JP S6267839A
Authority
JP
Japan
Prior art keywords
insulating film
forming
psg
contact hole
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20934685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0531820B2 (enrdf_load_stackoverflow
Inventor
Yoshiki Okumura
奥村　喜紀
Takao Yasue
孝夫 安江
Shuichi Matsuda
修一 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20934685A priority Critical patent/JPS6267839A/ja
Publication of JPS6267839A publication Critical patent/JPS6267839A/ja
Publication of JPH0531820B2 publication Critical patent/JPH0531820B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP20934685A 1985-09-19 1985-09-19 半導体装置の製造方法 Granted JPS6267839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20934685A JPS6267839A (ja) 1985-09-19 1985-09-19 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20934685A JPS6267839A (ja) 1985-09-19 1985-09-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6267839A true JPS6267839A (ja) 1987-03-27
JPH0531820B2 JPH0531820B2 (enrdf_load_stackoverflow) 1993-05-13

Family

ID=16571430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20934685A Granted JPS6267839A (ja) 1985-09-19 1985-09-19 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6267839A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01270334A (ja) * 1988-04-22 1989-10-27 Fujitsu Ltd 半導体装置の製造方法
JPH03291921A (ja) * 1989-12-28 1991-12-24 American Teleph & Telegr Co <Att> 集積回路製作方法
JPH05326718A (ja) * 1992-05-25 1993-12-10 Mitsubishi Electric Corp 半導体装置およびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01270334A (ja) * 1988-04-22 1989-10-27 Fujitsu Ltd 半導体装置の製造方法
JPH03291921A (ja) * 1989-12-28 1991-12-24 American Teleph & Telegr Co <Att> 集積回路製作方法
JPH05326718A (ja) * 1992-05-25 1993-12-10 Mitsubishi Electric Corp 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPH0531820B2 (enrdf_load_stackoverflow) 1993-05-13

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