JPS6259050B2 - - Google Patents

Info

Publication number
JPS6259050B2
JPS6259050B2 JP57129821A JP12982182A JPS6259050B2 JP S6259050 B2 JPS6259050 B2 JP S6259050B2 JP 57129821 A JP57129821 A JP 57129821A JP 12982182 A JP12982182 A JP 12982182A JP S6259050 B2 JPS6259050 B2 JP S6259050B2
Authority
JP
Japan
Prior art keywords
silicon nitride
crystalline silicon
nitrogen
amorphous silicon
added
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57129821A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5921507A (ja
Inventor
Hideo Nagashima
Norihei Takai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP12982182A priority Critical patent/JPS5921507A/ja
Publication of JPS5921507A publication Critical patent/JPS5921507A/ja
Publication of JPS6259050B2 publication Critical patent/JPS6259050B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP12982182A 1982-07-26 1982-07-26 結晶質窒化珪素の製造方法 Granted JPS5921507A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12982182A JPS5921507A (ja) 1982-07-26 1982-07-26 結晶質窒化珪素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12982182A JPS5921507A (ja) 1982-07-26 1982-07-26 結晶質窒化珪素の製造方法

Publications (2)

Publication Number Publication Date
JPS5921507A JPS5921507A (ja) 1984-02-03
JPS6259050B2 true JPS6259050B2 (enrdf_load_stackoverflow) 1987-12-09

Family

ID=15019050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12982182A Granted JPS5921507A (ja) 1982-07-26 1982-07-26 結晶質窒化珪素の製造方法

Country Status (1)

Country Link
JP (1) JPS5921507A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155509A (ja) * 1983-08-12 1985-08-15 Agency Of Ind Science & Technol 高純度等軸形状窒化けい素微粉の製造方法
JPS61191506A (ja) * 1985-02-18 1986-08-26 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
JPS62148309A (ja) * 1985-12-23 1987-07-02 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
JP2678872B2 (ja) * 1993-07-30 1997-11-19 カシオ計算機株式会社 波形表示方法
JP5682779B2 (ja) * 2011-02-04 2015-03-11 三菱マテリアル株式会社 高密度かつ接合性に優れたパワーモジュール用基板

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4145224A (en) * 1974-11-22 1979-03-20 Gte Sylvania Incorporated Method for enhancing the crystallization rate of high purity amorphous Si3 N4 powder, powders produced thereby and products therefrom
JPS53102300A (en) * 1977-02-18 1978-09-06 Toshiba Corp Preparation of type silicon nitride powders
JPS5423917A (en) * 1977-07-25 1979-02-22 Hitachi Metals Ltd Small raotating machine
JPS54124898A (en) * 1978-03-22 1979-09-28 Toyo Soda Mfg Co Ltd Preparation of silicon nitride
JPS55113603A (en) * 1979-02-19 1980-09-02 Toshiba Corp Manufacture of alpha silicon nitride powder
JPS5644006A (en) * 1979-09-19 1981-04-23 Toyobo Co Ltd Hollow yarn type reverse osmosis apparatus

Also Published As

Publication number Publication date
JPS5921507A (ja) 1984-02-03

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