JPS6258543B2 - - Google Patents

Info

Publication number
JPS6258543B2
JPS6258543B2 JP55121569A JP12156980A JPS6258543B2 JP S6258543 B2 JPS6258543 B2 JP S6258543B2 JP 55121569 A JP55121569 A JP 55121569A JP 12156980 A JP12156980 A JP 12156980A JP S6258543 B2 JPS6258543 B2 JP S6258543B2
Authority
JP
Japan
Prior art keywords
layer
oxide film
wiring
aluminum
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55121569A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5745949A (en
Inventor
Hiroshi Tokunaga
Ryoji Abe
Hiroshi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55121569A priority Critical patent/JPS5745949A/ja
Publication of JPS5745949A publication Critical patent/JPS5745949A/ja
Publication of JPS6258543B2 publication Critical patent/JPS6258543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/01—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP55121569A 1980-09-02 1980-09-02 Manufacture of semiconductor device Granted JPS5745949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55121569A JPS5745949A (en) 1980-09-02 1980-09-02 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55121569A JPS5745949A (en) 1980-09-02 1980-09-02 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5745949A JPS5745949A (en) 1982-03-16
JPS6258543B2 true JPS6258543B2 (enExample) 1987-12-07

Family

ID=14814471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55121569A Granted JPS5745949A (en) 1980-09-02 1980-09-02 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5745949A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2071487C (en) * 1989-10-25 1999-01-26 Akiyoshi Kawahito Shutter device for pressure containers

Also Published As

Publication number Publication date
JPS5745949A (en) 1982-03-16

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