JPS6258528B2 - - Google Patents
Info
- Publication number
- JPS6258528B2 JPS6258528B2 JP19679881A JP19679881A JPS6258528B2 JP S6258528 B2 JPS6258528 B2 JP S6258528B2 JP 19679881 A JP19679881 A JP 19679881A JP 19679881 A JP19679881 A JP 19679881A JP S6258528 B2 JPS6258528 B2 JP S6258528B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- discharge chamber
- gas pressure
- gas
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 description 32
- 238000010586 diagram Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Details Of Valves (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19679881A JPS5898916A (ja) | 1981-12-09 | 1981-12-09 | 半導体製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19679881A JPS5898916A (ja) | 1981-12-09 | 1981-12-09 | 半導体製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5898916A JPS5898916A (ja) | 1983-06-13 |
JPS6258528B2 true JPS6258528B2 (es) | 1987-12-07 |
Family
ID=16363819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19679881A Granted JPS5898916A (ja) | 1981-12-09 | 1981-12-09 | 半導体製造装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5898916A (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6273725A (ja) * | 1985-09-27 | 1987-04-04 | Nec Kyushu Ltd | 半導体装置製造用プラズマ灰化装置 |
JPH07509076A (ja) * | 1992-10-22 | 1995-10-05 | オーセ プリンテイング システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 記録担体用の空圧式制動装置 |
JP2942239B2 (ja) * | 1997-05-23 | 1999-08-30 | キヤノン株式会社 | 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置 |
JP3352418B2 (ja) | 1999-01-28 | 2002-12-03 | キヤノン株式会社 | 減圧処理方法及び減圧処理装置 |
WO2010024036A1 (ja) | 2008-08-28 | 2010-03-04 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理装置のクリーニング方法 |
JP6969465B2 (ja) * | 2018-03-20 | 2021-11-24 | 株式会社島津製作所 | 目標開度推定器および圧力調整真空バルブ |
-
1981
- 1981-12-09 JP JP19679881A patent/JPS5898916A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5898916A (ja) | 1983-06-13 |
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