JPS6250053B2 - - Google Patents

Info

Publication number
JPS6250053B2
JPS6250053B2 JP1620481A JP1620481A JPS6250053B2 JP S6250053 B2 JPS6250053 B2 JP S6250053B2 JP 1620481 A JP1620481 A JP 1620481A JP 1620481 A JP1620481 A JP 1620481A JP S6250053 B2 JPS6250053 B2 JP S6250053B2
Authority
JP
Japan
Prior art keywords
data
point
figures
bit matrix
basic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1620481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57130426A (en
Inventor
Sakae Myauchi
Kunio Takeuchi
Itsuo Yamamoto
Kaoru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP1620481A priority Critical patent/JPS57130426A/ja
Publication of JPS57130426A publication Critical patent/JPS57130426A/ja
Publication of JPS6250053B2 publication Critical patent/JPS6250053B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP1620481A 1981-02-05 1981-02-05 Exposure by electron rays Granted JPS57130426A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1620481A JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1620481A JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Publications (2)

Publication Number Publication Date
JPS57130426A JPS57130426A (en) 1982-08-12
JPS6250053B2 true JPS6250053B2 (enrdf_load_stackoverflow) 1987-10-22

Family

ID=11909975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1620481A Granted JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Country Status (1)

Country Link
JP (1) JPS57130426A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347851U (enrdf_load_stackoverflow) * 1986-09-16 1988-03-31

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07105329B2 (ja) * 1987-02-16 1995-11-13 株式会社東芝 荷電ビ−ム描画方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347851U (enrdf_load_stackoverflow) * 1986-09-16 1988-03-31

Also Published As

Publication number Publication date
JPS57130426A (en) 1982-08-12

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